Structural analysis of the PZT mirror with COMSOL.
Inline figures: Eigenmodes which involves large motion of the tombstone. In deed 10kHz mode is not the resonance of the PZT-mirror joint, but the resonance of the tombstone.
Attached PDF: Simulated transfer function of the PZT actuation. In order to simulate the PZT motion, boundary loads on the two sides of the PZT were applied with opposite signs.
10kHz peak appears as the resonance of the tombstone dominates the mirror motion. At 12kHz, the PZT extension and the backaction of the tombstone cancells each other and
the net displacement of the mirror becomes zero.