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  Coating Ring-down Measurement Lab elog, Page 5 of 18  Not logged in ELOG logo
ID Date Author Type Categorydown Subject
  390   Thu Aug 3 11:55:18 2017 Gabriele, RosalieGeneralMeasurementsS1600520 S1600521 S1600523 S1600524

2017-08-03

  • 11:43am in chamber
    • S1600520 in CR1
    • S1600521 in CR2
    • S1600523 in CR3
    • S1600524 in CR4
  • 11:46am roughing pump on
  • 11:55am turbo pump on
  • Excitations:
    • Quiet time before excitation: 1185835692
      Excitation broadband: 1185835727
      Quiet time after excitation: 1185835752

    • Quiet time before excitation: 1185837582
      Excitation broadband: 1185837617
      Quiet time after excitation: 1185837642

    • Quiet time before excitation: 1185839472
      Excitation broadband: 1185839507
      Quiet time after excitation: 1185839532

    • Quiet time before excitation: 1185841362
      Excitation broadband: 1185841397
      Quiet time after excitation: 1185841422

    • Quiet time before excitation: 1185843252
      Excitation broadband: 1185843287
      Quiet time after excitation: 1185843312

    • Quiet time before excitation: 1185845143
      Excitation broadband: 1185845178
      Quiet time after excitation: 1185845203

    • Quiet time before excitation: 1185847033
      Excitation broadband: 1185847068
      Quiet time after excitation: 1185847093

    • Quiet time before excitation: 1185848923
      Excitation broadband: 1185848958
      Quiet time after excitation: 1185848983

2017-08-04

  • 2:00pm valve closed, pumps off, venting
  391   Fri Aug 4 14:15:16 2017 Gabriele, RosalieGeneralMeasurementsS1600535, S1600536, S1600537, S1600538

2017-08-04

  • 2:04pm in chamber
    • S1600535 in CR1
    • S1600536 in CR2
    • S1600537 in CR3
    • S1600538 in CR4
  • 2:06pm roughing pump on
  • 2:15pm turbo pump on
  • Excitations:
    • Quiet time before excitation: 1185930952
      Excitation broadband: 1185930987
      Quiet time after excitation: 1185931013

    • Quiet time before excitation: 1185932843
      Excitation broadband: 1185932878
      Quiet time after excitation: 1185932903

    • Quiet time before excitation: 1185934733
      Excitation broadband: 1185934768
      Quiet time after excitation: 1185934793

    • Quiet time before excitation: 1185936623
      Excitation broadband: 1185936658
      Quiet time after excitation: 1185936683

    • Quiet time before excitation: 1185938513
      Excitation broadband: 1185938548
      Quiet time after excitation: 1185938573

    • Quiet time before excitation: 1185940403
      Excitation broadband: 1185940438
      Quiet time after excitation: 1185940463

    • Quiet time before excitation: 1185942293
      Excitation broadband: 1185942328
      Quiet time after excitation: 1185942353

    • Quiet time before excitation: 1185944183
      Excitation broadband: 1185944218
      Quiet time after excitation: 1185944243

 

2017-08-05

  • 1:23pm valve closed, pumps stopped, venting

 

  392   Sat Aug 5 13:46:08 2017 GabrieleGeneralMeasurementsS1600539 S1600547 S1600548 S1600550

2017-08-05

  • 1:37pm in chamber
    • S1600539 in CR1
    • S1600547 in CR2
    • S1600548 in CR3
    • S1600550 in CR4
  • 1:39pm roughing pump on
  • 1:47pm turbo pump on
  • Excitations
    • Quiet time before excitation: 1186015242
      Excitation broadband: 1186015278
      Quiet time after excitation: 1186015303

    • Quiet time before excitation: 1186017133
      Excitation broadband: 1186017168
      Quiet time after excitation: 1186017193

    • Quiet time before excitation: 1186019023
      Excitation broadband: 1186019058
      Quiet time after excitation: 1186019083

    • Quiet time before excitation: 1186020913
      Excitation broadband: 1186020948
      Quiet time after excitation: 1186020973

    • Quiet time before excitation: 1186022803
      Excitation broadband: 1186022838
      Quiet time after excitation: 1186022863

    • Quiet time before excitation: 1186024694
      Excitation broadband: 1186024729
      Quiet time after excitation: 1186024754

    • Quiet time before excitation: 1186026584
      Excitation broadband: 1186026619
      Quiet time after excitation: 1186026644

    • Quiet time before excitation: 1186028474
      Excitation broadband: 1186028509
      Quiet time after excitation: 1186028534

2017-08-07

  • 10:23am, valve closed, pumps off, venting
  393   Mon Aug 7 10:44:53 2017 GabrieleGeneralMeasurementsS1600525 S1600530 S1600532 S1600533

2017-08-07

  • 10:36am in chamber
    • S1600525 in CR1
    • S1600530 in CR2
    • S1600532 in CR3
    • S1600533 in CR4
  • 10:38am roughing pump on
  • 10:46am turbo pump on
  • Excitations
    • Quiet time before excitation: 1186171948
      Excitation broadband: 1186171983
      Quiet time after excitation: 1186172008

    • Quiet time before excitation: 1186173838
      Excitation broadband: 1186173873
      Quiet time after excitation: 1186173899

    • Quiet time before excitation: 1186175729
      Excitation broadband: 1186175764
      Quiet time after excitation: 1186175789

    • Quiet time before excitation: 1186177619
      Excitation broadband: 1186177654
      Quiet time after excitation: 1186177679

    • Quiet time before excitation: 1186179510
      Excitation broadband: 1186179545
      Quiet time after excitation: 1186179570

    • Quiet time before excitation: 1186181400
      Excitation broadband: 1186181435
      Quiet time after excitation: 1186181460

    • Quiet time before excitation: 1186183290
      Excitation broadband: 1186183325
      Quiet time after excitation: 1186183350

    • Quiet time before excitation: 1186185180
      Excitation broadband: 1186185215
      Quiet time after excitation: 1186185240

2017-08-08

  • 10:58am, valve closed, pumps stopped, venting
  395   Tue Aug 8 09:58:34 2017 GabrieleGeneralMeasurementsEffect of assist beam on tantala coatings - no post deposition annealing

ntroduction

A set of substrates have been coated by the Colorado State University Fort Collins group, with ~500 nm tantala and various ion assist beam parameters. Here's a table summarizing the depositions parameter, by Le Yang

 

substrate

main ion source voltage / V

main ion source current / mA

main ion source Ar flow / sccm

target oxygen flow / sccm

assist ion source voltage / V

assist ion source current / mA

assist ion source gas/sccm

thickness / nm

abs

/ ppm

notes

Ar

O2

s1600525 1250 600 18 49 100 100 12.5 0 480    

s1600535

1250

600

18

49

100

100

12.5

0

541

7.2

 

s1600536

1250

600

18

49

100

100

3.5

9

532

20.2

 

s1600537

1250

600

18

49

100

100

6.5

6

534

 

damaged

by

holder

s1600538

1250

600

18

49

100

100

6.5

6

524

 

scratch

s1600547

1250

600

18

49

100

100

6.5

6

528

15.4

 

s1600532

1250

600

18

49

200

100

12.5

0

518

17.8

 

s1600539

1250

600

18

49

200

100

3.5

9

541

17.7

 

s1600533

1250

600

18

49

200

100

6.5

6

539

11.6

 

s1600530

1250

600

18

49

100

200

12.5

0

537

10.3

 

s1600550

1250

600

18

49

100

200

3.5

9

519

19.9

 

s1600548

1250

600

18

49

100

200

6.5

6

532

17.2

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Coating losses before annealing

The plot below shows the measured loss angle for all modes of all samples, before annealing. The error bars for the datapoints are from the 95% confidence intervals computed from 8 measurements each. The red line is the average value over frequencies, and the shaded red area gives the 95% confidence interval of the mean value. The loss angle seems reasonably indipendent of frequency.

The following pot then shows the averaged loss angle as a function of the serial number, for reference

There are three main parameters that are changed in the deposition: the assist beam voltage, the assist beam current and the content of oxygen in the assist beam. The plots below show the losses as a function of those parameters. The x axis changes in each of the four panels, and for each plot, the color code is linked to one of the process variables:

Conclusions

Quoting Le Yang and Carmen Menoni

  1. under certain conditions as oxygen flow increase and Ar flow decrease, the loss angle becomes worse
  2. with existence of oxygen ions the loss is mitigated by increase of beam voltage
  3. relatively small particle size of oxygen compared with argon the caused the less effective interaction between assist ions and coating adatoms on the surface
  4. with increase of ion dose, the mechanical loss drops
  396   Tue Aug 8 10:18:30 2017 GabrieleGeneralMeasurementsEffect of assist beam on tantala coatings - after post deposition annealing

Introduction

The same set of samples described in the previous entry have been annealed at 500C for 9 hours. Then the loss angles have been measured again.

Results

The plot below shows the measured loss angle for all modes and all samples. After annealing all loss angles are significantly decreased, and they also show an increasing trend with frequency. As before, the blue points are the measurement points (averages of 8 ring-downs each) and the error bars are computed from the statistical error of the measurments. The red line shows the average of the loss angles for frequencies below 15 kHz, weigthed with the data points uncertainties. The red shaded area shows the 95% confidence interval of the mean.

If we plot the frequency-averaged loss angle as a function of the serial number, we see that there isn't much of a spread in the values:

We can again plot the loss angle as a function of the process variables. There are three main parameters that are changed in the deposition: the assist beam voltage, the assist beam current and the content of oxygen in the assist beam. The plots below show the losses as a function of those parameters. The x axis changes in each of the four panels, and for each plot, the color code is linked to one of the process variables:

This time I can't see much of a trend anywhere in those plots.

Linear fit

Since the loss angles show a clear increasing trend with frequency, instead of computing the mean value, I fit each dataset with a linear dependency on the frequency. To improve the fit I restricted the computations only to frequencies below 12 kHz. The results are shown below

The following plot shows the fitted loss angle at 1 kHz, as a function of the serial number. There is more spread in the results than when using the simple average:

 

And again, the dependency of the loss angle at 1 kHz on the process parameters:

The lowest loss angle is obtaine on sample S1600525, which was deposited without oxygen, low current and low voltage. But it's also the one sample that was deposited in a precedent separate run, and annealed twice at 500C.

 

  397   Tue Aug 8 11:21:19 2017 GabrieleGeneralMeasurementsS1600557 S1600558 S1600559 S1600560

2017-08-08

  • 11:10am in chamber
    • S1600557 in CR1
    • S1600558 in CR2
    • S1600559 in CR3
    • S1600560 in CR4
  • 11:13am roughing pump on
  • 11:21am turbo pump on
  • Excitation:
    • Quiet time before excitation: 1186262071
      Excitation broadband: 1186262106
      Quiet time after excitation: 1186262131

    • Quiet time before excitation: 1186269362
      Excitation broadband: 1186269397
      Quiet time after excitation: 1186269422

    • Quiet time before excitation: 1186276652
      Excitation broadband: 1186276687
      Quiet time after excitation: 1186276712

    • Quiet time before excitation: 1186283942
      Excitation broadband: 1186283977
      Quiet time after excitation: 1186284002

    • Quiet time before excitation: 1186291232
      Excitation broadband: 1186291267
      Quiet time after excitation: 1186291292

    • Quiet time before excitation: 1186298522
      Excitation broadband: 1186298557
      Quiet time after excitation: 1186298582

2017-08-15

  • 10:04am, pumps off, valve closed, venting

 

  403   Thu Aug 10 11:32:09 2017 GabrieleGeneralMeasurementsMode peak amplitudes with reference ESD

The uncoated, annealed and CO2 polished substrate S1600541 is installed in chamber CR0. This morning I performed a quick excitation: 1.6kV peak, broadband noise (500Hz - 32768 Hz), duration 20s. I measured the peak amplitude right after the excitation. The first plot below shows the SNR for all the detected 19 modes, as a function of frequency. The second plot shows the peak amplitude in physical units (radians/rHz of disk surface tilt) for all modes. The calibration of the surface motion should be reasonably good, better than a factor 2 of uncertaint. The attached TXT file contains the numerical data.

Attachment 3: peaks.txt
   1.1299461e+03   4.1911883e-06   3.7890494e+03
   2.5911635e+03   3.7687909e-06   2.9654534e+03
   4.5081875e+03   7.0826275e-07   3.4932225e+03
   6.8666454e+03   1.8347384e-06   3.7284735e+03
   6.8998265e+03   7.2550890e-08   1.4606621e+02
   9.6542682e+03   9.2541866e-07   4.2092492e+03
   1.0397923e+04   1.3057807e-07   7.8362131e+02
   1.2860601e+04   1.9470780e-07   1.4041656e+03
   1.4422018e+04   1.0362112e-07   6.3149271e+02
   1.6384301e+04   3.2555068e-08   2.0573770e+02
... 10 more lines ...
  404   Thu Aug 10 11:36:34 2017 GabrieleGeneralMeasurementsS1600541

2017-08-10

  • 11:25am, pumps stopped
Quote:

2017-06-28

We plan to leave S1600541 in vacuum for a long period, and measure the Q's periodically.

  • 3:48pm, S1600541 installed in CR0
  • 3:50pm, roughing pump on
  • 4:35pm turbo pump on

 

  408   Tue Aug 15 10:24:44 2017 GabrieleGeneralMeasurementsS1600535, S1600536, S1600537, S1600538

2017-08-15

  • 10:16am in chamber
    • S1600535 in CR1
    • S1600536 in CR2
    • S1600537 in CR3
    • S1600538 in CR4
  • 10:17am roughing pump on
  • 10:25am turbo pump on
  • Excitations
    • Quiet time before excitation: 1186867153
      Excitation broadband: 1186867188
      Quiet time after excitation: 1186867213

    • Quiet time before excitation: 1186869043
      Excitation broadband: 1186869078
      Quiet time after excitation: 1186869104

    • Quiet time before excitation: 1186870934
      Excitation broadband: 1186870969
      Quiet time after excitation: 1186870994

    • Quiet time before excitation: 1186872824
      Excitation broadband: 1186872859
      Quiet time after excitation: 1186872885

    • Quiet time before excitation: 1186874715
      Excitation broadband: 1186874750
      Quiet time after excitation: 1186874775

    • Quiet time before excitation: 1186876605
      Excitation broadband: 1186876640
      Quiet time after excitation: 1186876665

    • Quiet time before excitation: 1186878495
      Excitation broadband: 1186878530
      Quiet time after excitation: 1186878555

    • Quiet time before excitation: 1186880385
      Excitation broadband: 1186880420
      Quiet time after excitation: 1186880446

2017-08-16

  • 8:50am, valve close, pumps stopped, venting
  410   Wed Aug 16 09:05:23 2017 GabrieleGeneralMeasurementsS1600539 S1600547 S1600548 S1600550

2017-08-16

  • 8:55am in chamber
    • S1600539 in CR1
    • S1600547 in CR2
    • S1600548 in CR3
    • S1600550 in CR4
  • 8:57am roughing pump on
  • 9:06am turbo pump on
  • 10:10am pressure stuck at 1.8e-3, although the turbo pump was running
    • stopped pumps, opened the chamber, closed again
  • 12:15am roughing pump on
  • 12:22am turbo pump on

The vacuum issue was only a problem with the CG gauge reading 1.8e-3 as minimu, and the IGM didn't switch on because of the overpressure control. Alena fixed the configuration.

  • Excitations:
    • Quiet time before excitation: 1187132177
      Excitation broadband: 1187132212
      Quiet time after excitation: 1187132237

    • Quiet time before excitation: 1187134067
      Excitation broadband: 1187134102
      Quiet time after excitation: 1187134127

    • Quiet time before excitation: 1187135957
      Excitation broadband: 1187135992
      Quiet time after excitation: 1187136017

    • Quiet time before excitation: 1187137847
      Excitation broadband: 1187137882
      Quiet time after excitation: 1187137907

    • Quiet time before excitation: 1187139737
      Excitation broadband: 1187139772
      Quiet time after excitation: 1187139797

    • Quiet time before excitation: 1187141627
      Excitation broadband: 1187141662
      Quiet time after excitation: 1187141687

    • Quiet time before excitation: 1187143517
      Excitation broadband: 1187143553
      Quiet time after excitation: 1187143578

    • Quiet time before excitation: 1187145408
      Excitation broadband: 1187145443
      Quiet time after excitation: 1187145468

  421   Wed Aug 23 14:11:13 2017 Zach, GabrieleElectronicsMeasurementsInstalling ESD Prototype

2017-08-23

  • Installed ESD Prototype design by taping it to the older design, we then lowered the mount until it was as close as we could reasonably get it. The new PCB lines up when the top of the new PCB is lined up with the last electrode on the old one. The new PCB was slightly too narrow, the mounting holes are very close to the edge of the PCB, this can easily be corrected in later models.
  • Installed sample S1600541 into the single sample apparatus
  • Roughing pump on at 12:32
  • Turbo pump on at 2:28pm

Link to image1.JPG Link to image2.JPG

Attachment 1: image1.JPG
image1.JPG
Attachment 2: image2.JPG
image2.JPG
  422   Thu Aug 24 07:40:33 2017 GabrieleGeneralMeasurementsExcitations with new ESD

2017-08-23

  • Excitations
    • Quiet time before excitation: 1187577794
      Excitation broadband: 1187577826
      Quiet time after excitation: 1187577848

    • Quiet time before excitation: 1187585078
      Excitation broadband: 1187585111
      Quiet time after excitation: 1187585133

    • Quiet time before excitation: 1187592363
      Excitation broadband: 1187592395
      Quiet time after excitation: 1187592417

    • Quiet time before excitation: 1187599647
      Excitation broadband: 1187599679
      Quiet time after excitation: 1187599701

    • Quiet time before excitation: 1187606931
      Excitation broadband: 1187606964
      Quiet time after excitation: 1187606986

    • Quiet time before excitation: 1187614217
      Excitation broadband: 1187614249
      Quiet time after excitation: 1187614271

  423   Thu Aug 24 14:15:45 2017 GabrieleGeneralMeasurementsS1600525 S1600530 S1600532 S1600533

2017-08-24

  • 2:13pm in chamber
    • S1600525 in CR1
    • S1600530 in CR2
    • S1600532 in CR3
    • S1600533 in CR4
  • 2:15pm roughing pump on
  • 2:23pm turbo pump on
  • Excitation
    • Quiet time before excitation: 1187662248
      Excitation broadband: 1187662284
      Quiet time after excitation: 1187662308

    • Quiet time before excitation: 1187664138
      Excitation broadband: 1187664173
      Quiet time after excitation: 1187664198

    • Quiet time before excitation: 1187666028
      Excitation broadband: 1187666063
      Quiet time after excitation: 1187666088

    • Quiet time before excitation: 1187667918
      Excitation broadband: 1187667953
      Quiet time after excitation: 1187667978

    • Quiet time before excitation: 1187669809
      Excitation broadband: 1187669844
      Quiet time after excitation: 1187669869

    • Quiet time before excitation: 1187671699
      Excitation broadband: 1187671734
      Quiet time after excitation: 1187671759

    • Quiet time before excitation: 1187673589
      Excitation broadband: 1187673624
      Quiet time after excitation: 1187673649

    • Quiet time before excitation: 1187675479
      Excitation broadband: 1187675514
      Quiet time after excitation: 1187675539

  424   Fri Aug 25 07:25:32 2017 GabrieleGeneralMeasurementsExcitations with new ESD

The results show very low Q values, so we suspected some issues. Yesterday we openend the chamber and moved the ESD up, as high as possible. New excitation followed:

  • Quiet time before excitation: 1187676942
    Excitation broadband: 1187676974
    Quiet time after excitation: 1187676996

  • Quiet time before excitation: 1187684226
    Excitation broadband: 1187684258
    Quiet time after excitation: 1187684280

  • Quiet time before excitation: 1187691510
    Excitation broadband: 1187691542
    Quiet time after excitation: 1187691564

  • Quiet time before excitation: 1187698794
    Excitation broadband: 1187698826
    Quiet time after excitation: 1187698848
     

     

Quote:

2017-08-23

  • Excitations
    • Quiet time before excitation: 1187577794
      Excitation broadband: 1187577826
      Quiet time after excitation: 1187577848

    • Quiet time before excitation: 1187585078
      Excitation broadband: 1187585111
      Quiet time after excitation: 1187585133

    • Quiet time before excitation: 1187592363
      Excitation broadband: 1187592395
      Quiet time after excitation: 1187592417

    • Quiet time before excitation: 1187599647
      Excitation broadband: 1187599679
      Quiet time after excitation: 1187599701

    • Quiet time before excitation: 1187606931
      Excitation broadband: 1187606964
      Quiet time after excitation: 1187606986

    • Quiet time before excitation: 1187614217
      Excitation broadband: 1187614249
      Quiet time after excitation: 1187614271

 

  425   Fri Aug 25 19:29:07 2017 GabrieleGeneralMeasurementsExcitations with new ESD

New set of excitations after raising the ESD:

  • Quiet time before excitation: 1187676942
    Excitation broadband: 1187676974
    Quiet time after excitation: 1187676996
  • Quiet time before excitation: 1187684226
    Excitation broadband: 1187684258
    Quiet time after excitation: 1187684280
  • Quiet time before excitation: 1187691510
    Excitation broadband: 1187691542
    Quiet time after excitation: 1187691564
  • Quiet time before excitation: 1187698794
    Excitation broadband: 1187698826
    Quiet time after excitation: 1187698848

Q values are now reasonable

Quote:

The results show very low Q values, so we suspected some issues. Yesterday we openend the chamber and moved the ESD up, as high as possible. New excitation followed:

  • Quiet time before excitation: 1187676942
    Excitation broadband: 1187676974
    Quiet time after excitation: 1187676996

  • Quiet time before excitation: 1187684226
    Excitation broadband: 1187684258
    Quiet time after excitation: 1187684280

  • Quiet time before excitation: 1187691510
    Excitation broadband: 1187691542
    Quiet time after excitation: 1187691564

  • Quiet time before excitation: 1187698794
    Excitation broadband: 1187698826
    Quiet time after excitation: 1187698848
     

     

Quote:

2017-08-23

  • Excitations
    • Quiet time before excitation: 1187577794
      Excitation broadband: 1187577826
      Quiet time after excitation: 1187577848

    • Quiet time before excitation: 1187585078
      Excitation broadband: 1187585111
      Quiet time after excitation: 1187585133

    • Quiet time before excitation: 1187592363
      Excitation broadband: 1187592395
      Quiet time after excitation: 1187592417

    • Quiet time before excitation: 1187599647
      Excitation broadband: 1187599679
      Quiet time after excitation: 1187599701

    • Quiet time before excitation: 1187606931
      Excitation broadband: 1187606964
      Quiet time after excitation: 1187606986

    • Quiet time before excitation: 1187614217
      Excitation broadband: 1187614249
      Quiet time after excitation: 1187614271

 

 

  426   Tue Sep 5 11:11:39 2017 GabrieleGeneralMeasurementsS1600551 S1600552 LMA_substrate

2017-09-05

  • 11:00am in chamber
    • S1600551 in CR1
    • S1600552 in CR2
    • LMA substrate (CO2 polished) in CR3
  • 11:05am roughing pump on
  • 11:15am turbo pump on
  • Excitations:
    • Quiet time before excitation: 1188691872
      Excitation broadband: 1188691907
      Quiet time after excitation: 1188691932

    • Quiet time before excitation: 1188699162
      Excitation broadband: 1188699197
      Quiet time after excitation: 1188699222

    • Quiet time before excitation: 1188706452
      Excitation broadband: 1188706487
      Quiet time after excitation: 1188706512

    • Quiet time before excitation: 1188713742
      Excitation broadband: 1188713777
      Quiet time after excitation: 1188713802

    • Quiet time before excitation: 1188721032
      Excitation broadband: 1188721067
      Quiet time after excitation: 1188721092

2017-09-11

  • 10:37am, pumps topped, valve closed, venting
  427   Mon Sep 11 11:01:02 2017 GabrieleGeneralMeasurementsS1600561 S1600562 S1600563 S1600564

2017-09-11

  • 10:50am in chamber
    • S1600561 in CR1
    • S1600562 in CR2
    • S1600563 in CR3
    • S1600564 in CR4
  • 10:51am roughing pump on
  • 11:01am turbo pump on
  • Excitations
    • Quiet time before excitation: 1189209951
      Excitation broadband: 1189209986
      Quiet time after excitation: 1189210011

    • Quiet time before excitation: 1189217241
      Excitation broadband: 1189217276
      Quiet time after excitation: 1189217301

    • Quiet time before excitation: 1189224531
      Excitation broadband: 1189224566
      Quiet time after excitation: 1189224591

    • Quiet time before excitation: 1189231821
      Excitation broadband: 1189231856
      Quiet time after excitation: 1189231881

    • Quiet time before excitation: 1189239111
      Excitation broadband: 1189239146
      Quiet time after excitation: 1189239171

    • Quiet time before excitation: 1189246401
      Excitation broadband: 1189246436
      Quiet time after excitation: 1189246461

2017-09-12

  • 9:30am valve closed, pumps stopped, venting
  428   Tue Sep 12 09:58:45 2017 GabrieleGeneralMeasurementsS1600565 S1600566 S1600567 S1600568

2017-09-12

  • 9:45am, in chamber
    • S1600565 in CR1
    • S1600566 in CR2
    • S1600567 in CR3
    • S1600568 in CR4
  • 9:47am roughing pump on
  • 9:58am turbo pump on
  • Excitations:
    • Quiet time before excitation: 1189284835
      Excitation broadband: 1189284870
      Quiet time after excitation: 1189284895

    • Quiet time before excitation: 1189292125
      Excitation broadband: 1189292160
      Quiet time after excitation: 1189292185

    • Quiet time before excitation: 1189299415
      Excitation broadband: 1189299450
      Quiet time after excitation: 1189299475

    • Quiet time before excitation: 1189306705
      Excitation broadband: 1189306740
      Quiet time after excitation: 1189306765

    • Quiet time before excitation: 1189313995
      Excitation broadband: 1189314030
      Quiet time after excitation: 1189314055

    • Quiet time before excitation: 1189321285
      Excitation broadband: 1189321320
      Quiet time after excitation: 1189321345

2017-09-13

  • 9:50am valve closed, pumps stopped, venting
  429   Wed Sep 13 10:17:22 2017 GabrieleGeneralMeasurementsS1600563 S1600564

2017-09-13

  • 10:00am in chamber
    • S1600563 in CR1
    • S1600564 in CR2
  • 10:12am roughing pump on
  • 10:20am turbo pump on
  • Excitations
    • Quiet time before excitation: 1189372632
      Excitation broadband: 1189372668
      Quiet time after excitation: 1189372693

    • Quiet time before excitation: 1189379923
      Excitation broadband: 1189379958
      Quiet time after excitation: 1189379983

    • Quiet time before excitation: 1189387213
      Excitation broadband: 1189387248
      Quiet time after excitation: 1189387273

    • Quiet time before excitation: 1189394503
      Excitation broadband: 1189394538
      Quiet time after excitation: 1189394563

    • Quiet time before excitation: 1189401793
      Excitation broadband: 1189401828
      Quiet time after excitation: 1189401853

    • Quiet time before excitation: 1189409083
      Excitation broadband: 1189409118
      Quiet time after excitation: 1189409143

  431   Thu Sep 21 12:49:44 2017 GabrieleGeneralMeasurementsS1600569 S1600570 S1600571 S1600572

2017-09-21

  • 12:30pm, in chamber
    • S1600569 in CR1
    • S1600570 in CR2
    • S1600571 in CR3
    • S1600572 in CR4
  • 12:35am roughing pump on
  • 12:49am turbo pump on
  • Excitations
    • Quiet time before excitation: 1190073038
      Excitation broadband: 1190073073
      Quiet time after excitation: 1190073098

    • Quiet time before excitation: 1190080329
      Excitation broadband: 1190080364
      Quiet time after excitation: 1190080389

    • Quiet time before excitation: 1190087619
      Excitation broadband: 1190087654
      Quiet time after excitation: 1190087679

    • Quiet time before excitation: 1190094909
      Excitation broadband: 1190094944
      Quiet time after excitation: 1190094969

    • Quiet time before excitation: 1190102199
      Excitation broadband: 1190102235
      Quiet time after excitation: 1190102260

    • Quiet time before excitation: 1190109490
      Excitation broadband: 1190109525
      Quiet time after excitation: 1190109550

  • More excitations
    • Quiet time before excitation: 1190128992
      Excitation broadband: 1190129027
      Quiet time after excitation: 1190129052
    • Quiet time before excitation: 1190136282
      Excitation broadband: 1190136317
      Quiet time after excitation: 1190136342
    • Quiet time before excitation: 1190143572
      Excitation broadband: 1190143607
      Quiet time after excitation: 1190143632
    • Quiet time before excitation: 1190150862
      Excitation broadband: 1190150897
      Quiet time after excitation: 1190150922
    • Quiet time before excitation: 1190158152
      Excitation broadband: 1190158187
      Quiet time after excitation: 1190158212
    • Quiet time before excitation: 1190165442
      Excitation broadband: 1190165477
      Quiet time after excitation: 1190165502

 

 

  432   Thu Oct 5 14:28:35 2017 GabrieleGeneralMeasurementsLMA substrate

2017-10-05

  • 2:17pm in chamber
    • LMA substrate after cleaning in CR1
  • 2:20pm roughing pump on
  • 2:27pm turbo pump on
  • Excitations:
    • Quiet time before excitation: 1191288204
      Excitation broadband: 1191288239
      Quiet time after excitation: 1191288264

    • Quiet time before excitation: 1191295494
      Excitation broadband: 1191295529
      Quiet time after excitation: 1191295554

    • Quiet time before excitation: 1191302784
      Excitation broadband: 1191302819
      Quiet time after excitation: 1191302845

    • Quiet time before excitation: 1191310075
      Excitation broadband: 1191310110
      Quiet time after excitation: 1191310135

    • Quiet time before excitation: 1191317365
      Excitation broadband: 1191317400
      Quiet time after excitation: 1191317425

    • Quiet time before excitation: 1191324656
      Excitation broadband: 1191324691
      Quiet time after excitation: 1191324716

  433   Tue Oct 31 10:23:15 2017 GabrieleGeneralMeasurementsS1600573 S16600574 S1600575 S1600576

2017-10-31

  • 10:00am in chamber
    • S1600573 in CR1
    • S1600574 in CR2
    • S1600575 in CR3
    • S1600576 in CR4
  • 10:03am, roughing pump on
  • 10:10am, turbo  pump on
  • Excitations:
    • Quiet time before excitation: 1193519856
      Excitation broadband: 1193519892
      Quiet time after excitation: 1193519917

    • Quiet time before excitation: 1193527147
      Excitation broadband: 1193527182
      Quiet time after excitation: 1193527207

    • Quiet time before excitation: 1193534437
      Excitation broadband: 1193534472
      Quiet time after excitation: 1193534497

    • Quiet time before excitation: 1193541727
      Excitation broadband: 1193541762
      Quiet time after excitation: 1193541788

    • Quiet time before excitation: 1193549018
      Excitation broadband: 1193549053
      Quiet time after excitation: 1193549078

    • Quiet time before excitation: 1193556308
      Excitation broadband: 1193556343
      Quiet time after excitation: 1193556368

  434   Wed Nov 1 09:37:07 2017 GabrieleGeneralMeasurementsS1600577 S1600578 S1600579 S1600580

2017-11-01

  • 9:30am in chamber
    • S1600577 in CR1
    • S1600578 in CR2
    • S1600579 in CR3
    • S1600580 in CR4
  • 9:34am roughing pump on
  • Excitations:
    • Quiet time before excitation: 1193600511
      Excitation broadband: 1193600546
      Quiet time after excitation: 1193600571

    • Quiet time before excitation: 1193607801
      Excitation broadband: 1193607836
      Quiet time after excitation: 1193607861

    • Quiet time before excitation: 1193615091
      Excitation broadband: 1193615126
      Quiet time after excitation: 1193615151

    • Quiet time before excitation: 1193622381
      Excitation broadband: 1193622417
      Quiet time after excitation: 1193622442

    • Quiet time before excitation: 1193629672
      Excitation broadband: 1193629707
      Quiet time after excitation: 1193629732

    • Quiet time before excitation: 1193636962
      Excitation broadband: 1193636997
      Quiet time after excitation: 1193637022

  435   Tue Nov 7 07:57:18 2017 GabrieleGeneralMeasurementsS1600581 S1600582 S1600582 S1600584

2017-11-06

  • 8:27am in chamber
    • S1600581 in CR1
    • S1600582 in CR2
    • S1600583 in CR3
    • S1600584 in CR4
  • 8:35am ruoghing pump on
  • Excitations:
    • Quiet time before excitation: 1194032618
      Excitation broadband: 1194032653
      Quiet time after excitation: 1194032678

    • Quiet time before excitation: 1194039908
      Excitation broadband: 1194039943
      Quiet time after excitation: 1194039968

    • Quiet time before excitation: 1194047198
      Excitation broadband: 1194047233
      Quiet time after excitation: 1194047258

    • Quiet time before excitation: 1194054488
      Excitation broadband: 1194054523
      Quiet time after excitation: 1194054548

    • Quiet time before excitation: 1194061778
      Excitation broadband: 1194061813
      Quiet time after excitation: 1194061838

    • Quiet time before excitation: 1194069068
      Excitation broadband: 1194069103
      Quiet time after excitation: 1194069128

  436   Tue Nov 7 11:09:24 2017 GabrieleGeneralMeasurementsS1600577 in test chamber, S16600573 in CR1

The last two set of measurements on S1600577 > S1600584 gave very low Q values, see plot. I suspect some problem with the measurement system (high pressure?).

So I installed S1600577 in the test chamber CR0.

  • Roughing pump on at 10:50am
  • Turbo pump on at 11:09am
  • Excitations
    • Quiet time before excitation: 1194131633
      Excitation broadband: 1194131666
      Quiet time after excitation: 1194131688

    • Quiet time before excitation: 1194138918
      Excitation broadband: 1194138950
      Quiet time after excitation: 1194138972

    • Quiet time before excitation: 1194146202
      Excitation broadband: 1194146234
      Quiet time after excitation: 1194146256

    • Quiet time before excitation: 1194153486
      Excitation broadband: 1194153519
      Quiet time after excitation: 1194153541

I also installed S1600573 in CR1 (main chamber). This substrate was measured a few days ago and had good Q values.

  437   Tue Nov 7 11:10:37 2017 GabrieleGeneralMeasurementsS1600573 S1600582 S1600583 S1600584

2017-11-07

  • 11:08am in chamber
    • S1600573 in CR1
    • S1600582 in CR2
    • S1600583 in CR3
    • S1600584 in CR4
  • 11:15am roughing pump on
  • 11:25am turbo pump on
  • Excitations
    • Quiet time before excitation: 1194128536
      Excitation broadband: 1194128571
      Quiet time after excitation: 1194128596

    • Quiet time before excitation: 1194135827
      Excitation broadband: 1194135863
      Quiet time after excitation: 1194135888

    • Quiet time before excitation: 1194143118
      Excitation broadband: 1194143153
      Quiet time after excitation: 1194143178

    • Quiet time before excitation: 1194150408
      Excitation broadband: 1194150443
      Quiet time after excitation: 1194150468

    • Quiet time before excitation: 1194157698
      Excitation broadband: 1194157733
      Quiet time after excitation: 1194157758

    • Quiet time before excitation: 1194164988
      Excitation broadband: 1194165023
      Quiet time after excitation: 1194165049

  438   Thu Nov 9 10:03:15 2017 GabrieleGeneralMeasurementsS1600575 S1600578 S1600579 S1600580

2017-11-09

  • 9:53am in chamber
    • S1600575 in CR1
    • S1600578 in CR2
    • S1600579 in CR3
    • S1600580 in CR4
  • 9:55am roughing pump on
  • 10:05am turbo pump on
  • Excitations
    • Quiet time before excitation: 1194296521
      Excitation broadband: 1194296556
      Quiet time after excitation: 1194296581

    • Quiet time before excitation: 1194303811
      Excitation broadband: 1194303846
      Quiet time after excitation: 1194303871

    • Quiet time before excitation: 1194311101
      Excitation broadband: 1194311136
      Quiet time after excitation: 1194311161

    • Quiet time before excitation: 1194318391
      Excitation broadband: 1194318426
      Quiet time after excitation: 1194318451

    • Quiet time before excitation: 1194325681
      Excitation broadband: 1194325716
      Quiet time after excitation: 1194325741

    • Quiet time before excitation: 1194332971
      Excitation broadband: 1194333006
      Quiet time after excitation: 1194333031

       

  439   Fri Nov 10 08:56:12 2017 GabrieleGeneralMeasurementsS1600526 S1600553 S1600557 S1600558

2017-11-10

  • 8:48am in chamber
    • S1600526 in CR1
    • S1600553 in CR2
    • S1600557 in CR3
    • S1600558 in CR4
  • 8:49am roughing pump on
  • 8:57am turbo pump on
  • Excitations:
    • Quiet time before excitation: 1194378897
      Excitation broadband: 1194378932
      Quiet time after excitation: 1194378957

    • Quiet time before excitation: 1194380787
      Excitation broadband: 1194380822
      Quiet time after excitation: 1194380847

    • Quiet time before excitation: 1194382677
      Excitation broadband: 1194382712
      Quiet time after excitation: 1194382737

    • Quiet time before excitation: 1194384567
      Excitation broadband: 1194384602
      Quiet time after excitation: 1194384628

    • Quiet time before excitation: 1194386458
      Excitation broadband: 1194386493
      Quiet time after excitation: 1194386518

    • Quiet time before excitation: 1194388348
      Excitation broadband: 1194388383
      Quiet time after excitation: 1194388408

    • Quiet time before excitation: 1194390239
      Excitation broadband: 1194390274
      Quiet time after excitation: 1194390299

    • Quiet time before excitation: 1194392129
      Excitation broadband: 1194392164
      Quiet time after excitation: 1194392189

  • More excitations:

    • Quiet time before excitation: 1194394523
      Excitation broadband: 1194394558
      Quiet time after excitation: 1194394583

    • Quiet time before excitation: 1194396413
      Excitation broadband: 1194396448
      Quiet time after excitation: 1194396473

    • Quiet time before excitation: 1194398303
      Excitation broadband: 1194398338
      Quiet time after excitation: 1194398363

    • Quiet time before excitation: 1194400193
      Excitation broadband: 1194400228
      Quiet time after excitation: 1194400253

    • Quiet time before excitation: 1194402083
      Excitation broadband: 1194402118
      Quiet time after excitation: 1194402144

    • Quiet time before excitation: 1194403974
      Excitation broadband: 1194404009
      Quiet time after excitation: 1194404034

    • Quiet time before excitation: 1194405864
      Excitation broadband: 1194405899
      Quiet time after excitation: 1194405924

    • Quiet time before excitation: 1194407754
      Excitation broadband: 1194407789
      Quiet time after excitation: 1194407814

  440   Sat Nov 11 09:46:03 2017 GabrieleGeneralMeasurementsS1600528 S1600531 S1600543 S1600544

2017-11-11

  • 9:34am in chamber
    • S1600528 in CR1
    • S1600531 in CR2
    • S1600543 in CR3
    • S1600544 in CR4
  • 9:37am roughing pump on
  • 9:44am turbo pump on
  • Excitations
    • Quiet time before excitation: 1194468414
      Excitation broadband: 1194468449
      Quiet time after excitation: 1194468474

    • Quiet time before excitation: 1194470304
      Excitation broadband: 1194470339
      Quiet time after excitation: 1194470364

    • Quiet time before excitation: 1194472194
      Excitation broadband: 1194472229
      Quiet time after excitation: 1194472254

    • Quiet time before excitation: 1194474084
      Excitation broadband: 1194474120
      Quiet time after excitation: 1194474145

    • Quiet time before excitation: 1194475975
      Excitation broadband: 1194476010
      Quiet time after excitation: 1194476035

    • Quiet time before excitation: 1194477865
      Excitation broadband: 1194477900
      Quiet time after excitation: 1194477925

    • Quiet time before excitation: 1194479755
      Excitation broadband: 1194479790
      Quiet time after excitation: 1194479815

    • Quiet time before excitation: 1194481645
      Excitation broadband: 1194481680
      Quiet time after excitation: 1194481705

  • More excitations:

    • Quiet time before excitation: 1194487258
      Excitation broadband: 1194487293
      Quiet time after excitation: 1194487319

    • Quiet time before excitation: 1194489149
      Excitation broadband: 1194489184
      Quiet time after excitation: 1194489209

    • Quiet time before excitation: 1194491039
      Excitation broadband: 1194491074
      Quiet time after excitation: 1194491099

    • Quiet time before excitation: 1194492929
      Excitation broadband: 1194492964
      Quiet time after excitation: 1194492989

    • Quiet time before excitation: 1194494819
      Excitation broadband: 1194494854
      Quiet time after excitation: 1194494879

    • Quiet time before excitation: 1194496709
      Excitation broadband: 1194496744
      Quiet time after excitation: 1194496769

    • Quiet time before excitation: 1194498599
      Excitation broadband: 1194498634
      Quiet time after excitation: 1194498659

    • Quiet time before excitation: 1194500489
      Excitation broadband: 1194500524
      Quiet time after excitation: 1194500549

       

  441   Sun Nov 12 20:08:48 2017 GabrieleGeneralMeasurementsS1600585 S1600586 S1600587 S1600588

2017-11-12

  • 1:20pm, in chamber
    • S1600585 in CR1
    • S1600586 in CR2
    • S1600587 in CR3
    • S1600588 in CR4
  • 1:22pm roughing pump on
  • 1:30pm turbo pump on
  • Excitations
    • Quiet time before excitation: 1194568128
      Excitation broadband: 1194568163
      Quiet time after excitation: 1194568188

    • Quiet time before excitation: 1194575418
      Excitation broadband: 1194575453
      Quiet time after excitation: 1194575478

    • Quiet time before excitation: 1194582708
      Excitation broadband: 1194582743
      Quiet time after excitation: 1194582768

    • Quiet time before excitation: 1194589999
      Excitation broadband: 1194590034
      Quiet time after excitation: 1194590059

    • Quiet time before excitation: 1194597289
      Excitation broadband: 1194597324
      Quiet time after excitation: 1194597349

    • Quiet time before excitation: 1194604579
      Excitation broadband: 1194604614
      Quiet time after excitation: 1194604639

  442   Mon Nov 13 10:14:33 2017 GabrieleGeneralMeasurementsS1600589 S1600590 S1600591 S1600592

2017-11-13

  • 10:00am in chamber
    • S1600589 in CR1
    • S1600590 in CR2
    • S1600591 in CR3
    • S1600592 in CR4
  • 10:04am roughing pump on
  • 10:15am turbo pump on
  • Excitations:
    • Quiet time before excitation: 1194642706
      Excitation broadband: 1194642741
      Quiet time after excitation: 1194642766

    • Quiet time before excitation: 1194649996
      Excitation broadband: 1194650031
      Quiet time after excitation: 1194650056

    • Quiet time before excitation: 1194657286
      Excitation broadband: 1194657321
      Quiet time after excitation: 1194657346

    • Quiet time before excitation: 1194664576
      Excitation broadband: 1194664611
      Quiet time after excitation: 1194664637

    • Quiet time before excitation: 1194671867
      Excitation broadband: 1194671902
      Quiet time after excitation: 1194671927

    • Quiet time before excitation: 1194679157
      Excitation broadband: 1194679192
      Quiet time after excitation: 1194679217

       

  443   Tue Nov 21 15:31:25 2017 GabrieleGeneralMeasurementsS1600526 S1600553 S1600557 S1600558

2017-11-21

  • 3:29pm in chamber
    • S1600526 in CR1
    • S1600553 in CR2
    • S1600557 in CR3
    • S1600558 in CR4
  • 3:30pm roughing pump on
  • 3:39pm turbo pump on
  • Excitations
    • Quiet time before excitation: 1195356936
      Excitation broadband: 1195356971
      Quiet time after excitation: 1195356996
    • Quiet time before excitation: 1195358826
      Excitation broadband: 1195358861
      Quiet time after excitation: 1195358886
    • Quiet time before excitation: 1195360716
      Excitation broadband: 1195360751
      Quiet time after excitation: 1195360776
    • Quiet time before excitation: 1195362606
      Excitation broadband: 1195362641
      Quiet time after excitation: 1195362666
    • Quiet time before excitation: 1195364496
      Excitation broadband: 1195364531
      Quiet time after excitation: 1195364556
    • Quiet time before excitation: 1195366386
      Excitation broadband: 1195366421
      Quiet time after excitation: 1195366446
    • Quiet time before excitation: 1195368276
      Excitation broadband: 1195368311
      Quiet time after excitation: 1195368336
    • Quiet time before excitation: 1195370166
      Excitation broadband: 1195370201
      Quiet time after excitation: 1195370226
    • Quiet time before excitation: 1195372056
      Excitation broadband: 1195372091
      Quiet time after excitation: 1195372116
    • Quiet time before excitation: 1195373946
      Excitation broadband: 1195373981
      Quiet time after excitation: 1195374006
    • Quiet time before excitation: 1195375836
      Excitation broadband: 1195375871
      Quiet time after excitation: 1195375896
    • Quiet time before excitation: 1195377727
      Excitation broadband: 1195377762
      Quiet time after excitation: 1195377787
    • Quiet time before excitation: 1195379617
      Excitation broadband: 1195379652
      Quiet time after excitation: 1195379677
    • Quiet time before excitation: 1195381507
      Excitation broadband: 1195381542
      Quiet time after excitation: 1195381568
    • Quiet time before excitation: 1195383398
      Excitation broadband: 1195383433
      Quiet time after excitation: 1195383458
    • Quiet time before excitation: 1195385288
      Excitation broadband: 1195385323
      Quiet time after excitation: 1195385348
       
  444   Wed Dec 6 07:53:47 2017 GabrieleGeneralMeasurementsSubstrates from University Wafers

2017-12-06

Four fused silica substrates from University Wafers, 76.2mm diameter / 0.5 mm thickness installed in chamber

  • 7:50am in chamber
  • 7:54am roughing pump on
  • 8:03am turbo pump on
  445   Mon Dec 11 08:49:08 2017 Gabriele, Aaron, Brittany, SethGeneralMeasurements50mm / 0.5mm substrate from University Wafers
  • Installed in the test chamber CR0
  • Excitations:
    • Quiet time before excitation: 1196822477
      Excitation broadband: 1196822509
      Quiet time after excitation: 1196822532
    • Quiet time before excitation: 1196826162
      Excitation broadband: 1196826194
      Quiet time after excitation: 1196826216
    • Quiet time before excitation: 1196829846
      Excitation broadband: 1196829879
      Quiet time after excitation: 1196829901
    • Quiet time before excitation: 1196833531
      Excitation broadband: 1196833563
      Quiet time after excitation: 1196833585
    • Quiet time before excitation: 1196837215
      Excitation broadband: 1196837248
      Quiet time after excitation: 1196837270
    • Quiet time before excitation: 1196840900
      Excitation broadband: 1196840933
      Quiet time after excitation: 1196840955
    • Quiet time before excitation: 1196844585
      Excitation broadband: 1196844617
      Quiet time after excitation: 1196844639
    • Quiet time before excitation: 1196848269
      Excitation broadband: 1196848301
      Quiet time after excitation: 1196848323
       

 

  446   Mon Dec 11 12:51:05 2017 GabrieleGeneralMeasurementsS1600559 C31003

2017-12-11

S1600559 back from LMA, it's been annealed for 10h at 900C
C31003 is a sample from LMA, with double side silica coating.

  • 12:45pm
    • S1600559 in CR1
    • C31003 in CR2
  • 12:47pm roughing pump on
  • 12:57pm turbo pump on
  • Excitations:
    • Quiet time before excitation: 1197072051
      Excitation broadband: 1197072086
      Quiet time after excitation: 1197072111
    • Quiet time before excitation: 1197079341
      Excitation broadband: 1197079376
      Quiet time after excitation: 1197079401
    • Quiet time before excitation: 1197086631
      Excitation broadband: 1197086666
      Quiet time after excitation: 1197086691
    • Quiet time before excitation: 1197093921
      Excitation broadband: 1197093956
      Quiet time after excitation: 1197093981
    • Quiet time before excitation: 1197101211
      Excitation broadband: 1197101246
      Quiet time after excitation: 1197101271
    • Quiet time before excitation: 1197108501
      Excitation broadband: 1197108536
      Quiet time after excitation: 1197108561
    • Quiet time before excitation: 1197115791
      Excitation broadband: 1197115826
      Quiet time after excitation: 1197115851
    • Quiet time before excitation: 1197123081
      Excitation broadband: 1197123116
      Quiet time after excitation: 1197123141
       
  447   Tue Dec 12 15:35:27 2017 GabrieleGeneralMeasurementsUniversity Wafers substrates (76.2mm/0.5mm) annelaed

2017-12-12

Four substrates from University Wafers (76.2mm / 0.5mm) in chamber

  • 3:32pm in chamber (CR1 - CR4)
  • 3:35pm roughing pump on
  • 3:45pm turbo pump on
  • Excitations:
    • Quiet time before excitation: 1197168131
      Excitation broadband: 1197168166
      Quiet time after excitation: 1197168191
    • Quiet time before excitation: 1197175421
      Excitation broadband: 1197175456
      Quiet time after excitation: 1197175481
    • Quiet time before excitation: 1197182711
      Excitation broadband: 1197182746
      Quiet time after excitation: 1197182771
    • Quiet time before excitation: 1197190001
      Excitation broadband: 1197190036
      Quiet time after excitation: 1197190061
    • Quiet time before excitation: 1197197291
      Excitation broadband: 1197197326
      Quiet time after excitation: 1197197351
    • Quiet time before excitation: 1197204581
      Excitation broadband: 1197204616
      Quiet time after excitation: 1197204641
    • Quiet time before excitation: 1197211871
      Excitation broadband: 1197211906
      Quiet time after excitation: 1197211931
       
  448   Tue Dec 19 10:06:04 2017 GabrieleGeneralMeasurementsCO2 polished UW substrates

The four surviving University Wafers 76.2mm/0.5mm wafers have been CO2 polished. They are identified by numbers from 1 to 4 on the container. Number 4 was used for tests, so it might not be as good as the other three. During number3 polishing, the CO2 laser tripped, so I restarted the process from the beginning.

2017-12-19

  • 10:10am in chamber
    • number 1 in CR1
    • number 2 in CR2
    • number 3 in CR3
    • number 4 in CR4
  • 10:15am roughing pump on
  • 10:25am turbo pump on
  • Excitations
    • Quiet time before excitation: 1197750193
      Excitation broadband: 1197750228
      Quiet time after excitation: 1197750253
    • Quiet time before excitation: 1197757483
      Excitation broadband: 1197757518
      Quiet time after excitation: 1197757543
    • Quiet time before excitation: 1197764773
      Excitation broadband: 1197764808
      Quiet time after excitation: 1197764833
    • Quiet time before excitation: 1197772063
      Excitation broadband: 1197772098
      Quiet time after excitation: 1197772123
    • Quiet time before excitation: 1197779353
      Excitation broadband: 1197779388
      Quiet time after excitation: 1197779413
    • Quiet time before excitation: 1197786643
      Excitation broadband: 1197786678
      Quiet time after excitation: 1197786703
    • Quiet time before excitation: 1197793933
      Excitation broadband: 1197793969
      Quiet time after excitation: 1197793994
    • Quiet time before excitation: 1197801224
      Excitation broadband: 1197801259
      Quiet time after excitation: 1197801284
       
  449   Tue Jan 2 15:32:39 2018 GabrieleGeneralMeasurementsCO2 polished UW substrates

2018-01-02

After annealing

  • 3:25pm in chamber, as before
  • 3:28pm roughing pump on
  • 3:40pm turbo pump on
  • Excitations:
    • Quiet time before excitation: 1198982242
      Excitation broadband: 1198982277
      Quiet time after excitation: 1198982302
    • Quiet time before excitation: 1198989532
      Excitation broadband: 1198989567
      Quiet time after excitation: 1198989592
    • Quiet time before excitation: 1198996822
      Excitation broadband: 1198996857
      Quiet time after excitation: 1198996882
    • Quiet time before excitation: 1199004112
      Excitation broadband: 1199004147
      Quiet time after excitation: 1199004172
    • Quiet time before excitation: 1199011402
      Excitation broadband: 1199011437
      Quiet time after excitation: 1199011462
    • Quiet time before excitation: 1199018692
      Excitation broadband: 1199018727
      Quiet time after excitation: 1199018752
    • Quiet time before excitation: 1199025982
      Excitation broadband: 1199026017
      Quiet time after excitation: 1199026042
       
Quote:

The four surviving University Wafers 76.2mm/0.5mm wafers have been CO2 polished. They are identified by numbers from 1 to 4 on the container. Number 4 was used for tests, so it might not be as good as the other three. During number3 polishing, the CO2 laser tripped, so I restarted the process from the beginning.

2017-12-19

  • 10:10am in chamber
    • number 1 in CR1
    • number 2 in CR2
    • number 3 in CR3
    • number 4 in CR4
  • 10:15am roughing pump on
  • 10:25am turbo pump on
  • Excitations
    • Quiet time before excitation: 1197750193
      Excitation broadband: 1197750228
      Quiet time after excitation: 1197750253
    • Quiet time before excitation: 1197757483
      Excitation broadband: 1197757518
      Quiet time after excitation: 1197757543
    • Quiet time before excitation: 1197764773
      Excitation broadband: 1197764808
      Quiet time after excitation: 1197764833
    • Quiet time before excitation: 1197772063
      Excitation broadband: 1197772098
      Quiet time after excitation: 1197772123
    • Quiet time before excitation: 1197779353
      Excitation broadband: 1197779388
      Quiet time after excitation: 1197779413
    • Quiet time before excitation: 1197786643
      Excitation broadband: 1197786678
      Quiet time after excitation: 1197786703
    • Quiet time before excitation: 1197793933
      Excitation broadband: 1197793969
      Quiet time after excitation: 1197793994
    • Quiet time before excitation: 1197801224
      Excitation broadband: 1197801259
      Quiet time after excitation: 1197801284
       

 

  450   Thu Jan 11 15:40:28 2018 GabrieleGeneralMeasurementsLMA sample (post annealing)

2018-01-11

  • 3:35pm in chamber CR1
  • 3:36pm roughing pump on
  • 3:46pm turbo pump on
  • Excitations
    • Quiet time before excitation: 1199760182
      Excitation broadband: 1199760217
      Quiet time after excitation: 1199760242
    • Quiet time before excitation: 1199767472
      Excitation broadband: 1199767507
      Quiet time after excitation: 1199767532
    • Quiet time before excitation: 1199774762
      Excitation broadband: 1199774797
      Quiet time after excitation: 1199774822
    • Quiet time before excitation: 1199782052
      Excitation broadband: 1199782087
      Quiet time after excitation: 1199782112
    • Quiet time before excitation: 1199789342
      Excitation broadband: 1199789377
      Quiet time after excitation: 1199789402
    • Quiet time before excitation: 1199796632
      Excitation broadband: 1199796667
      Quiet time after excitation: 1199796692
    • Quiet time before excitation: 1199803922
      Excitation broadband: 1199803957
      Quiet time after excitation: 1199803982
  • More excitations
    • Quiet time before excitation: 1200257200
      Excitation broadband: 1200257235
      Quiet time after excitation: 1200257260
    • Quiet time before excitation: 1200264490
      Excitation broadband: 1200264525
      Quiet time after excitation: 1200264550
    • Quiet time before excitation: 1200271780
      Excitation broadband: 1200271815
      Quiet time after excitation: 1200271840
    • Quiet time before excitation: 1200279070
      Excitation broadband: 1200279105
      Quiet time after excitation: 1200279130
    • Quiet time before excitation: 1200286360
      Excitation broadband: 1200286395
      Quiet time after excitation: 1200286421
    • Quiet time before excitation: 1200293651
      Excitation broadband: 1200293686
      Quiet time after excitation: 1200293711
    • Quiet time before excitation: 1200300941
      Excitation broadband: 1200300976
      Quiet time after excitation: 1200301001
    • Quiet time before excitation: 1200308231
      Excitation broadband: 1200308266
      Quiet time after excitation: 1200308291
  451   Wed Jan 17 16:04:22 2018 GabrieleGeneralMeasurementsS1600560

2018-01-17

Substrate, uncoated, received back from LMA. Annealed twice at 900C for 9h.

  • 4:03pm in chamber CR0
  • 4:05pm roughing pump on
  • 4:18pm turbo pump on
  • Excitations
    • Quiet time before excitation: 1200283647
      Excitation broadband: 1200283680
      Quiet time after excitation: 1200283702
    • Quiet time before excitation: 1200287332
      Excitation broadband: 1200287364
      Quiet time after excitation: 1200287386
    • Quiet time before excitation: 1200291016
      Excitation broadband: 1200291048
      Quiet time after excitation: 1200291070
    • Quiet time before excitation: 1200294700
      Excitation broadband: 1200294733
      Quiet time after excitation: 1200294755
    • Quiet time before excitation: 1200298385
      Excitation broadband: 1200298417
      Quiet time after excitation: 1200298439
    • Quiet time before excitation: 1200302069
      Excitation broadband: 1200302101
      Quiet time after excitation: 1200302124
    • Quiet time before excitation: 1200305754
      Excitation broadband: 1200305786
      Quiet time after excitation: 1200305808
    • Quiet time before excitation: 1200309438
      Excitation broadband: 1200309470
      Quiet time after excitation: 1200309492
       
  452   Thu Jan 25 13:32:26 2018 GabrieleGeneralMeasurementsS1800014 S1800015 S1800016 S1800017

2018-01-25

  • 1:30pm in chamber
    • S1800014 in CR1
    • S1800015 in CR2
    • S1800016 in CR3
    • S1800017 in CR4
  • 1:33pm roughing pump on
  • 1:40pm turbo pump on
  • Excitations
    • Quiet time before excitation: 1201042674
      Excitation broadband: 1201042709
      Quiet time after excitation: 1201042734
    • Quiet time before excitation: 1201049964
      Excitation broadband: 1201049999
      Quiet time after excitation: 1201050024
    • Quiet time before excitation: 1201057254
      Excitation broadband: 1201057289
      Quiet time after excitation: 1201057314
    • Quiet time before excitation: 1201064544
      Excitation broadband: 1201064579
      Quiet time after excitation: 1201064604
    • Quiet time before excitation: 1201071834
      Excitation broadband: 1201071869
      Quiet time after excitation: 1201071894
    • Quiet time before excitation: 1201079124
      Excitation broadband: 1201079159
      Quiet time after excitation: 1201079184
    • Quiet time before excitation: 1201086414
      Excitation broadband: 1201086449
      Quiet time after excitation: 1201086474
    • Quiet time before excitation: 1201093704
      Excitation broadband: 1201093739
      Quiet time after excitation: 1201093764
       
  455   Tue Jan 30 15:05:34 2018 GabrieleGeneralMeasurementsS1800515 S1800516 S1800517 S1800518

2018-01-30

50 mm fused silica disks from University Wafer

  • 2:50pm in chamber
    • S1800515 in CR1
    • S1800516 in CR2
    • S1800517 in CR3
    • S1800518 in CR4
  • 2:55pm roughing pump on
  • 3:03pm turbo pump on
  • Excitations:
    • Quiet time before excitation: 1201400855
      Excitation broadband: 1201400890
      Quiet time after excitation: 1201400915
    • Quiet time before excitation: 1201404545
      Excitation broadband: 1201404580
      Quiet time after excitation: 1201404605
    • Quiet time before excitation: 1201408236
      Excitation broadband: 1201408271
      Quiet time after excitation: 1201408296
    • Quiet time before excitation: 1201411926
      Excitation broadband: 1201411961
      Quiet time after excitation: 1201411986
    • Quiet time before excitation: 1201415616
      Excitation broadband: 1201415651
      Quiet time after excitation: 1201415676
    • Quiet time before excitation: 1201419306
      Excitation broadband: 1201419341
      Quiet time after excitation: 1201419366
    • Quiet time before excitation: 1201422996
      Excitation broadband: 1201423031
      Quiet time after excitation: 1201423056
    • Quiet time before excitation: 1201426686
      Excitation broadband: 1201426721
      Quiet time after excitation: 1201426746
  457   Wed Jan 31 12:38:13 2018 GabrieleGeneralMeasurementsS1800519 S1800520 S1800521 S1800522

2018-01-31

50 mm fused silica disks from University Wafer

  • 12:35pm in chamber
    • S1800519 in CR1
    • S1800520 in CR2
    • S1800521 in CR3
    • S1800522 in CR4
  • 12:38pm roughing pump on
  • 12:47pm turbo pump on
  • Excitations
    • Quiet time before excitation: 1201477474
      Excitation broadband: 1201477509
      Quiet time after excitation: 1201477534
    • Quiet time before excitation: 1201481164
      Excitation broadband: 1201481199
      Quiet time after excitation: 1201481224
    • Quiet time before excitation: 1201484854
      Excitation broadband: 1201484889
      Quiet time after excitation: 1201484914
    • Quiet time before excitation: 1201488544
      Excitation broadband: 1201488579
      Quiet time after excitation: 1201488604
    • Quiet time before excitation: 1201492234
      Excitation broadband: 1201492270
      Quiet time after excitation: 1201492294
    • Quiet time before excitation: 1201495924
      Excitation broadband: 1201495959
      Quiet time after excitation: 1201495984
    • Quiet time before excitation: 1201499614
      Excitation broadband: 1201499649
      Quiet time after excitation: 1201499674
    • Quiet time before excitation: 1201503304
      Excitation broadband: 1201503339
      Quiet time after excitation: 1201503364
       
  458   Fri Feb 9 11:08:07 2018 GabrieleGeneralMeasurementsS1600589

2018-02-09

  • 11:05am in chamber CR0
  • 11:07am roughing pump on
  • 11:23am turbo pump on
  • Excitations:
    • Quiet time before excitation: 1202253044
      Excitation broadband: 1202253076
      Quiet time after excitation: 1202253098
    • Quiet time before excitation: 1202254928
      Excitation broadband: 1202254960
      Quiet time after excitation: 1202254982
    • Quiet time before excitation: 1202256812
      Excitation broadband: 1202256844
      Quiet time after excitation: 1202256866
    • Quiet time before excitation: 1202258696
      Excitation broadband: 1202258728
      Quiet time after excitation: 1202258750
    • Quiet time before excitation: 1202260580
      Excitation broadband: 1202260612
      Quiet time after excitation: 1202260634
    • Quiet time before excitation: 1202262464
      Excitation broadband: 1202262496
      Quiet time after excitation: 1202262518
    • Quiet time before excitation: 1202264348
      Excitation broadband: 1202264380
      Quiet time after excitation: 1202264402
      Quiet time before excitation: 1202266232
      Excitation broadband: 1202266264
      Quiet time after excitation: 1202266286
  • More:
    • Quiet time before excitation: 1202289774
      Excitation broadband: 1202289807
      Quiet time after excitation: 1202289829
    • Quiet time before excitation: 1202291659
      Excitation broadband: 1202291691
      Quiet time after excitation: 1202291713
    • Quiet time before excitation: 1202293543
      Excitation broadband: 1202293575
      Quiet time after excitation: 1202293597
    • Quiet time before excitation: 1202295427
      Excitation broadband: 1202295459
      Quiet time after excitation: 1202295481
    • Quiet time before excitation: 1202297311
      Excitation broadband: 1202297343
      Quiet time after excitation: 1202297365
    • Quiet time before excitation: 1202299195
      Excitation broadband: 1202299227
      Quiet time after excitation: 1202299249
    • Quiet time before excitation: 1202301079
      Excitation broadband: 1202301111
      Quiet time after excitation: 1202301133
    • Quiet time before excitation: 1202302963
      Excitation broadband: 1202302995
      Quiet time after excitation: 1202303017
       
  460   Wed Feb 14 11:55:27 2018 GabrieleGeneralMeasurementsS1600609 S1600610 S1600611 S1600612

2017-02-14

  • 11:45am in chamber
    • S1600609 in CR1
    • S1600610 in CR2
    • S1600611 in CR3
    • S1600612 in CR4
  • 11:50am roughing pump on
  • 12:00pm turbo pump on
  • Excitations:
    • Quiet time before excitation: 1202684283
      Excitation broadband: 1202684318
      Quiet time after excitation: 1202684343
    • Quiet time before excitation: 1202691573
      Excitation broadband: 1202691608
      Quiet time after excitation: 1202691633
    • Quiet time before excitation: 1202698863
      Excitation broadband: 1202698898
      Quiet time after excitation: 1202698923
    • Quiet time before excitation: 1202706153
      Excitation broadband: 1202706188
      Quiet time after excitation: 1202706213
    • Quiet time before excitation: 1202713443
      Excitation broadband: 1202713478
      Quiet time after excitation: 1202713503
    • Quiet time before excitation: 1202720733
      Excitation broadband: 1202720768
      Quiet time after excitation: 1202720793
    • Quiet time before excitation: 1202728023
      Excitation broadband: 1202728058
      Quiet time after excitation: 1202728083
    • Quiet time before excitation: 1202735313
      Excitation broadband: 1202735348
      Quiet time after excitation: 1202735373
       
  461   Thu Feb 15 07:47:12 2018 GabrieleGeneralMeasurementsS1600613 S1600614 S1600615 S1600616

2018-02-15

  • 7:43am in chamber
    • S1600613 in CR1
    • S1600614 in CR2
    • S1600615 in CR3
    • S1600616 in CR4
  • 7:45am roughing pump on
  • 7:55am turbo pump on
  • Excitations:
    • Quiet time before excitation: 1202755960
      Excitation broadband: 1202755995
      Quiet time after excitation: 1202756020
    • Quiet time before excitation: 1202763251
      Excitation broadband: 1202763286
      Quiet time after excitation: 1202763311
    • Quiet time before excitation: 1202770541
      Excitation broadband: 1202770576
      Quiet time after excitation: 1202770601
    • Quiet time before excitation: 1202777831
      Excitation broadband: 1202777866
      Quiet time after excitation: 1202777891
    • Quiet time before excitation: 1202785121
      Excitation broadband: 1202785156
      Quiet time after excitation: 1202785181
    • Quiet time before excitation: 1202792411
      Excitation broadband: 1202792446
      Quiet time after excitation: 1202792471
    • Quiet time before excitation: 1202799701
      Excitation broadband: 1202799736
      Quiet time after excitation: 1202799761
    • Quiet time before excitation: 1202806991
      Excitation broadband: 1202807026
      Quiet time after excitation: 1202807051
       
  462   Thu Feb 22 12:40:40 2018 GabrieleGeneralMeasurementsS1600565 S1600566 S1600567 S1600568

2018-02-22

  • 12:38pm in chamber
    • S1600565 in CR1
    • S1600566 in CR2
    • S1600567 in CR3
    • S1600568 in CR4
  • 12:40pm roughing pump on
  • 12:50pm turbo pump on
  • Excitations
    • Quiet time before excitation: 1203387862
      Excitation broadband: 1203387897
      Quiet time after excitation: 1203387922
    • Quiet time before excitation: 1203389752
      Excitation broadband: 1203389787
      Quiet time after excitation: 1203389812
    • Quiet time before excitation: 1203391642
      Excitation broadband: 1203391677
      Quiet time after excitation: 1203391702
    • Quiet time before excitation: 1203393532
      Excitation broadband: 1203393567
      Quiet time after excitation: 1203393592
    • Quiet time before excitation: 1203395422
      Excitation broadband: 1203395457
      Quiet time after excitation: 1203395482
    • Quiet time before excitation: 1203397312
      Excitation broadband: 1203397347
      Quiet time after excitation: 1203397372
    • Quiet time before excitation: 1203399202
      Excitation broadband: 1203399237
      Quiet time after excitation: 1203399262
    • Quiet time before excitation: 1203401092
      Excitation broadband: 1203401127
      Quiet time after excitation: 1203401152
  • Apparently the system was not compeetly recovered from yesterday's power cut. So the previous injections did not work as planned
    • Quiet time before excitation: 1203468783
      Excitation broadband: 1203468818
      Quiet time after excitation: 1203468843
    • Quiet time before excitation: 1203470673
      Excitation broadband: 1203470708
      Quiet time after excitation: 1203470733
    • Quiet time before excitation: 1203472563
      Excitation broadband: 1203472598
      Quiet time after excitation: 1203472623
    • Quiet time before excitation: 1203474453
      Excitation broadband: 1203474488
      Quiet time after excitation: 1203474513
    • Quiet time before excitation: 1203476343
      Excitation broadband: 1203476379
      Quiet time after excitation: 1203476404
    • Quiet time before excitation: 1203478234
      Excitation broadband: 1203478269
      Quiet time after excitation: 1203478294
    • Quiet time before excitation: 1203480124
      Excitation broadband: 1203480159
      Quiet time after excitation: 1203480184
    • Quiet time before excitation: 1203482014
      Excitation broadband: 1203482049
      Quiet time after excitation: 1203482074
       
  463   Sat Feb 24 12:15:38 2018 GabrieleGeneralMeasurementsS1600519 S1600522 S1600569

2018-02-24

  • 12:12pm in chamber
    • S1600519 in CR1
    • S1600522 in CR2
    • S1600569 in CR3
  • 12:15pm roughing pump on
  • 12:25pm turbo pump on
  464   Mon Feb 26 10:04:34 2018 GabrieleGeneralMeasurementsS1600583 S1600585 S1600586 S1600590

2018-02-26

  • 10:00am in chamber
    • S1600583 in CR1
    • S1600585 in CR2
    • S1600586 in CR3
    • S1600590 in CR4
  • 10:04am roughing pump on
  • 10:13am turbo pump on
ELOG V3.1.3-