We laser polished S1600546, 547, 548, 549, 550 and 551
Fixed the 307 gauge controller (a missing contact on the rair panel). The low pressure gauge was connected to 1G port and has measured 1.7E-6 torr. We are not sure since how long the turbo was operating (no vacuum logger yet).
Installed a gate valve between the roughing and tubbo pump. See below a pump down curve. The convection gauge is not calibrated. the turbo started at 14th min (at about 3 torr)
At 5pm the pressure was 6.5e-6 torr.
Checked again at:
Please see prosidures for pumping down and venting with air for the test vacuum chamber here https://dcc.ligo.org/T1600304
Ordered the clean room (hardware+hepa filters) and vacuum gauges
Annealing run (447-448) on 3" wafers - Crime 10/27/2016 https://dcc.ligo.org/T1600485-v1
Microscope inspection of samples:
Started annealing run Annealing run (489-490) on 3" wafers - Crime 01/18/2017 https://dcc.ligo.org/T1700027 using new hardware
The new chamber was build. The first attempt to pump down was unsuccessful because of dislocated lid. After the lit was placed properly, the chamber was pumped down to 0.1 torr within 8 min. In future a sky hook will be used to help placing the lid properly. The clamps should not be placed on the lid before the roughing pump turned on.
The turbo pump controller failed. Error code 698 – call the vendor.
Turbo pump controller (new chamber) was configured. Need to reduce the frequency or setup a standby mode. First pump down: E-7 range reached within about an hour. See plot: blue - old crime chamber, pink - new crime chamber.
Started Annealing run (491-496) on 3" wafers - Crime 01/20/2017 https://dcc.ligo.org/LIGO-T1700036 Will be done by Monday
Started an annealing run https://dcc.ligo.org/LIGO-T1700271
Will be ready by Friday morning
Started annealing run https://dcc.ligo.org/T1700293
Will be ready by June 28th afternoon
One of the HeNe lasers died (the one for measuring slots CR2 and CR4). It had no outgoing light when I came in this morning. I connected the laser to another identical power supply. The laser started going on and of and the power supply was making some sparkling noise. I swapped the laser with the test chamber (CR0). No re alignment was required for measurement slots CR1 and CR3. A very slight alignment was done for measuring slots CR2 and CR4 after the laser from the test chamber was installed. So temporary we do not have a setup to measure 2" samples easily. Attaching pictures of the broken laser`s label
Repeating the previous measurement after correcting the alignement. Did not vent the chamber.
Started a measurement for CR1 and CR2 only. CR4 is instaled, centered and ready to be measured later
Aligned CR14 chamber back to 3" disks.
Installed a new HeNe laser for the old chamber cr0. No major alignement was required. The laser mount restored the alinement. Will run a test measurement now.