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  Coating Ring-down Measurement Lab elog, Page 8 of 18  Not logged in ELOG logo
ID Date Author Type Category Subject
  531   Tue May 15 15:10:52 2018 AlenaGeneralMeasurementsS1600587 S1600588
  • 03:10 pm in chamber
    • S1600587 in CR1
    • S1600588 in CR2
  • 03:10 pm roughing pump on
  • 03:24 pm turbo pump on
  530   Mon May 14 13:42:42 2018 AlenaGeneralMeasurementsS1800520
  • 01:41 pm in chamber
    • S1800520 in CR0
  • 01:41 pm roughing pump on
  • 01:59 pm turbo pump on
  529   Fri May 11 14:27:54 2018 AlenaGeneralMeasurementsS1600597 S1600598 S1600599 S1600600 S1800516
  • 02:27 pm in chamber
    • S1600597 in CR1
    • S1600598 in CR2
    • S1600599 in CR3
    • S1600600 in CR4
  • 02:27 pm roughing pump on
  • 02:35 pm turbo pump on

 

  • 02:40 pm in chamber
    • S1800516 in CR0
  • 02:40 pm roughing pump on
  • 02:54 pm turbo pump on
  528   Thu May 10 10:20:08 2018 AlenaGeneralMeasurementsS1600593, S1600594, S1600595, S1600596, S1800519

2018-04-04

  • 12:09 pm in chamber
    • S1600593 in CR1
    • S1600594 in CR2
    • S1600595 in CR3
    • S1600596 in CR4
  • 12:00 pm roughing pump on
  • 12:12 pm turbo pump on

     

  • 12:30 pm in chamber
    • S1800519 in CR0
  • 12:31 pm roughing pump on
  • 12:50 pm turbo pump on
  527   Wed May 9 13:57:41 2018 AlenaGeneralMeasurementsS1800515

2018-05-09

 

  • 01:57 pm in chamber:
    • S1800515 in CR0
  • 01:58 pm roughing pump on
  • 14:05  turbo pump on
  526   Fri May 4 13:54:55 2018 AlenaGeneralMeasurementsS1800516 AK_01 AK_03

  2018-05-04

  • 02:21 pm in chamber:
    • AK_01 in CR1
    • AK_03 in CR3
  • 02:25 pm roughing pump on
  • 02:44 pm turbo pump on

 

  • 03:30 pm in chamber:
    • S1800516 in CR0
  • 03: 35 pm roughing pump on
  • 03:42 turbo pump on
  525   Thu May 3 17:37:18 2018 AlenaGeneralMeasurementsS1800520

2018-05-02

  • 17:37 added ND because QPD was oversaturated. Repeating the measurement without venting
    • S1800520 in CR0
  524   Wed May 2 10:08:20 2018 AlenaGeneralMeasurementsS1800520

2018-05-02

  • 10:05 am in chamber
    • S1800520 in CR0
  • 10:06 am roughing pump on
  • 10:20 am  turbo pump on
  523   Tue May 1 16:25:47 2018 AlenaGeneralMeasurementsS1800516

2018-05-01

  • 16:10 pm in chamber
    • S1800516 in CR0
  • 16:20 pm roughing pump on
  • 16:40 pm turbo pump on
  522   Mon Apr 23 08:28:19 2018 Liyuan Zhang, Gabriele VajenteGeneralMeasurementsS1600577 S1600580 S1600582 S1600585

There was no problem with either the gauges nor the pressure. The IGM took a long time to go on, but finally all pressures looked good. The measurement is also good

Quote:

2018-04-20

  • 3:10pm in chamber
    • S1600577 in CR1
    • S1600580 in CR2
    • S1600582 in CR3
    • S1600585 in CR4
  • 3:30pm roughing pump on
  • 4:00pm turbo pump on
  • 4:30pm It was found IGM gauge didn't start and pressure stopped at 1.8e-3. Gabriel vented chamber and re-pumped it.
  • 4:50pm roughing pump on
  • 17:05pm turbo pump on
  • 17:10 pm pressure 1.7e-3, IGM display " starting"
  • We start measurement.

 

  521   Fri Apr 20 16:50:41 2018 Liyuan Zhang, Gabriele VajenteGeneralMeasurementsS1600577 S1600580 S1600582 S1600585

2018-04-20

  • 3:10pm in chamber
    • S1600577 in CR1
    • S1600580 in CR2
    • S1600582 in CR3
    • S1600585 in CR4
  • 3:30pm roughing pump on
  • 4:00pm turbo pump on
  • 4:30pm It was found IGM gauge didn't start and pressure stopped at 1.8e-3. Gabriel vented chamber and re-pumped it.
  • 4:50pm roughing pump on
  • 17:05pm turbo pump on
  • 17:10 pm pressure 1.7e-3, IGM display " starting"
  • We start measurement.
  520   Sat Apr 14 18:31:25 2018 GabrieleGeneralMeasurementsS1800634

2018-04-14

  • 6:40pm in chamber CR0
  • 6:45pm roughing pump on
  • 6:59pm turbo pump on
  519   Sat Apr 14 18:12:56 2018 GabrieleGeneralMeasurementsS1600577 S1600580 S1600582 S1600585

2018-04-14

  • 6:10pm in chamber
    • S1600577 in CR1
    • S1600580 in CR2
    • S1600582 in CR3
    • S1600585 in CR4
  • 6:12pm roughing pump on
  • 6:22pm turbo pump on
  518   Fri Apr 13 10:39:04 2018 GabrieleGeneralMeasurements S1600620 S1600621 S1600623 S1600624

2018-04-13

  • 10:37am in chamber
    • S1600620 in CR1
    • S1600621 in CR2
    • S1600623 in CR3
    • S1600624 in CR4
  • 10:41am roughing pump on
  • 10:50am turbo pump on
  517   Thu Apr 12 10:33:06 2018 GabrieleGeneralVacuumRead-out of vacuum gauges

I failed to interface in a reliable way the datalogger with Linux. So i hooked up the four analog outputs of the vacuum gauge controller to the fast ADC. The voltages are read and saved to disk at a reduced rate (16 Hz, throught the epics channels):

X3:CR0-VACUUM_VAC1_OUTMON
X3:CR0-VACUUM_VAC2_OUTMON
X3:CR0-VACUUM_VAC3_OUTMON
X3:CR0-VACUUM_VAC4_OUTMON

A python script running on the workstation (~/pycrime/automation_scripts/vacuum.py) reads the voltage every second and update four epics channels:

X3:CR0-VACUUM_CG0 = convection gauge of test chamber (high pressure gauge)
X3:CR0-VACUUM_IGM0 = ionization gauge of test chamber (low pressure gauge)
X3:CR0-VACUUM_CG1 = convection gauge of main chamber (high pressure gauge)
X3:CR0-VACUUM_IGM1 = ionization gauge of main chamber (low pressure gauge)

See below for an example during pump down (the test chamber is at a too high pressure for the IGM to work, so it returns a bogus number).

Here's an example of venting and pumping down

  516   Thu Apr 12 08:36:16 2018 GabrieleGeneralMeasurementsS1800634

2018-04-12

  • 8:30 am in chamber
    • S1800634 in CR1
  • 8:35 am roughing pump on
  • 8:45 pm turbo pump on
  515   Mon Apr 9 15:34:57 2018 AlenaGeneralMeasurementsS1800634

2018-04-09

  • 3:30 pm in chamber
    • S1800634 in CR1
  • 3:30 pm roughing pump on
  • 3:45 pm turbo pump on
  514   Sat Apr 7 09:15:56 2018 GabrieleGeneralMeasurementsS1800634

2018-04-07

  • 9:10am in chamber
    • S1800634 in CR2
  • 9:15am roughing pump on
  • 9:25am turbo pump on
  513   Fri Apr 6 08:13:53 2018 GabrieleGeneralMeasurementsS1600620 S1600621 S1600623 S1600624

2018-04-06

  • 8:11am in chamber
    • S1600620 in CR1
    • S1600621 in CR2
    • S1600623 in CR3
    • S1600624 in CR4
  • 8:13am roughing pump on
  • 8:25am turbo pump on
  512   Thu Apr 5 08:41:10 2018 GabrieleGeneralMeasurementsS1800634

2018-04-05

  • 8:35am in chamber
    • S1800634 in CR2
  • 8:39am roughing pump on
  • 7:49pm turbo pump on
  511   Wed Apr 4 16:36:15 2018 AlenaGeneralMeasurementsS1600551, S1600552, S1600554, S1600555

2018-04-04

  • 16:10am in chamber
    • S1600551 in CR1
    • S1600552 in CR2
    • S1600554 in CR3
    • S1600555 in CR4
  • 16:30 roughing pump on
  • 16:40 turbo pump on
  510   Tue Apr 3 16:12:15 2018 Liyuan Zhang, Gabriele GeneralMeasurementsS1600541, S1600542, S1600545, S1600546

2018-04-03

  • 4:12pm in chamber
    • S1600541 in CR1
    • S1600542 in CR2
    • S1600545 in CR3
    • S1600546 in CR4
  • 3:30pm roughing pump on
  • 4:00pm turbo pump on
  509   Mon Apr 2 09:30:36 2018 GabrieleGeneralMeasurementsS1600574 S1600575

2018-04-02

  • 9:28am in chamber
    • S1600574 in CR1
    • S1600575 in CR2
  • 9:32am roughing pump on
  • 9:40am turbo pump on
  508   Sun Apr 1 10:11:22 2018 GabrieleGeneralGeneralAnnealing on blanks

Started annealing of blank disks: S1600541 S1600542 S1600545 S1600546 S1600551 S1600552 S1600554 S1600555

900C for 9 hours, starting at 10:30am

  507   Sun Apr 1 09:14:25 2018 GabrieleGeneralMeasurementsS1600579 S1600581 S1600583 S1600586

2018-04-01

  • 9:13am in chamber
    • S1600579 in CR1
    • S1600581 in CR2
    • S1600583 in CR3
    • S1600586 in CR4
  • 9:20am roughing pump on
  • 9:31am turbo pump on
  506   Sat Mar 31 09:58:56 2018 GabrieleGeneralGeneralAnnealing run

Started annealing of S1600579 S1600581 S1600583 S1600586 at 7:00pm 03/30

  • ramp up to 600 C at 100 C/hour
  • hold at 600 C for 10 hours
  • ramp down at 100 C/hour
  505   Sat Mar 31 08:29:38 2018 GabrieleGeneralMeasurementsS1600566 S1600567 S1600568 S1600569

2018-03-31

  • 8:28am in chamber
    • S1600566 in CR1
    • S1600657 in CR2
    • S1600568 in CR3
    • S1600569 in CR4
  • 8:29am roughing pump on
  • 8:39am turbo pump on
  504   Fri Mar 30 19:12:15 2018 GabrieleGeneralMeasurementsZirconia S1600519 S1600522 S1600565

2018-03-30

  • 7:10pm in chamber
    • S1800634 (Zirconia) in CR1
    • S1600519 in CR2
    • S1600522 in CR3
    • S1600565 in CR4
  • 7:12pm roughing pump on
  • 7:20pm turbo pump on
  503   Thu Mar 29 19:51:51 2018 GabrieleGeneralMeasurementsS1600579 S1600581 S1600583 S1600586

2018-03-29

  • 7:47pm in chamber
    • S1600579 in CR1
    • S1600581 in CR2
    • S1600583 in CR3
    • S1600586 in CR4
  • 7:50pm roughing pump on
  • 8:00pm turbo pump on
  502   Thu Mar 29 16:15:08 2018 GabrieleGeneralGeneralAnnealing run

Samples S1600519 S1600522 S1600565 S1600566 S1600567 S1600568 S1600569

  • ramp up to 500C at 100C/h
  • hold at 500C for 10h
  • ramp down at 100C/h
  501   Thu Mar 29 09:17:11 2018 GabrieleGeneralMeasurements S1800615 S1800616 S1800617 S1800618

2018-03-29

  • 9:15am in chamber
    • S1800615 in CR1
    • S1800616 in CR2
    • S1800617 in CR3
    • S1800618 in CR4
  • 9:17am roughing pump on
  • 9:25am all pumps fo chamber 0 off, clean air filters off
  • 9:25am turbo pump on
  500   Wed Mar 28 15:46:55 2018 GabrieleGeneralMeasurements S1800611 S1800612 S1800613 S1800614

2018-03-28

  • 3:45pm in chamber
    • S1800611 in CR1
    • S1800612 in CR2
    • S1800613 in CR3
    • S1800614 in CR4
  • 3:47pm roughing pump on
  • 3:55pm all pumps fo chamber 0 off, clean air filters off
  • 4:00pm turbo pump on
  499   Wed Mar 28 15:32:07 2018 GabrieleGeneralGeneralAnnealing run

Started annealing of S1600579 S1600581 S1600583 S1600586 at 3:25pm

  • ramp up to 500 C at 100 C/hour
  • hold at 500 C for 10 hours
  • ramp down at 100 C/hour
  498   Tue Mar 27 16:37:22 2018 GabrieleGeneralVacuumTurbo pump for test chamber CR0 set point

I changed the set point of the test chamber turbo pump to 666 Hz. This was done by setting the "standby rotation speed" to 80% and enabling the standby condition.

  497   Tue Mar 27 16:36:49 2018 GabrieleOpticsConfigurationOptical levers re-aligned for 50mm substrates
  496   Tue Mar 27 11:41:06 2018 GabrieleGeneralGeneralAnnealing run

At 11:35am, started annealing of ten fused silica wafers (50.8mm / 0.1 mm) [S1800611 S1800612 S1800613 S1800614 S1800615 S1800616 S1800617 S1800618 S1800619 S1800620]

  • ramp up to 900 C at 100 C/h
  • hold for 9 h
  • ramp down at 100 C/h

Attachment 1: IMG_4259.PNG
IMG_4259.PNG
  495   Tue Mar 27 08:01:06 2018 GabrieleGeneralMeasurementsS1600579 S1600581 S1600583 S1600586

2018-03-27

  • 7:59am in chamber
    • S1600579 in CR1
    • S1600581 in CR2
    • S1600583 in CR3
    • S1600586 in CR4
  • 8:00am roughing pump on
  • 8:08am turbo pump on
  494   Mon Mar 26 16:10:03 2018 GabrieleGeneralGeneralAnnealing run

Started annealing of S1600579 S1600581 S1600583 S1600586 at 5:00pm

  • ramp up to 400 C at 100 C/hour
  • hold at 400 C for 5 hours
  • ramp down at 100 C/hour
  493   Mon Mar 26 07:57:01 2018 GabrieleGeneralMeasurementsS1600579 S1600581 S1600583 S1600586

2018-03-26

  • 7:53am in chamber
    • S1600579 in CR1
    • S1600581 in CR2
    • S1600583 in CR3
    • S1600586 in CR4
  • 7:55am roughing pump on
  • 8:05am turbo pump on
  492   Sun Mar 25 17:18:52 2018 GabrieleGeneralMeasurementsS1600577 S1600580 S1600582 S1600585

2018-03-25

  • 5:15pm in chamber
    • S1600577 in CR1
    • S1600580 in CR2
    • S1600582 in CR3
    • S1600585 in CR4
  • 5:18pm roughing pump on
  • 5:26 turbo pump on
  491   Sun Mar 25 17:10:04 2018 GabrieleGeneralGeneralAnnealing run

Started annealing of S1600579 S1600581 S1600583 S1600586 at 5:00pm

  • ramp up to 300 C at 100 C/hour
  • hold at 300 C for 5 hours
  • ramp down at 100 C/hour
  490   Sat Mar 24 17:13:49 2018 GabrieleGeneralMeasurementsS1800515 S1800519

2018-03-24

  • 5:10pm in chamber
    • S1800515 in CR1
    • S1800519 in CR2
  • 5:13pm roughing pump on
  • 5:20pm turbo pump on
  489   Sat Mar 24 17:03:57 2018 GabrieleGeneralGeneralAnnealing run

Started annealing of S1600577 S1600580 S1600582 S1600585 at 5pm

ramp up to 600C at 100C/h

hold at 600C for 10 h

ramp down at 100C/h

  488   Fri Mar 16 11:16:54 2018 GabrieleGeneralMeasurementsS1600620 S1600621 S1600623 S1600624

2018-03-16

  • 11:14am in chamber
    • S1600620 in CR1
    • S1600621 in CR2
    • S1600623 in CR3
    • S1600624 in CR4
  • 11:14am roughing pump on
  • 11:24am turbo pump on
  487   Wed Mar 14 16:56:58 2018 GabrieleGeneralMeasurementsS1600589 S1600590 S1600610 S1600614

2018-03-14

  • 4:55pm in chamber
    • S1600589 in CR1
    • S1600590 in CR2
    • S1600610 in CR3
    • S1600614 in CR4
  • 4:57pm roughing pump on
  • 5:06pm turbo pump on
  486   Wed Mar 14 08:40:52 2018 GabrieleGeneralMeasurementsS1600577 S1600580 S1600582 S1600585

2018-03-14

  • 8:37am in chamber
    • S1600577 in CR1
    • S1600580 in CR2
    • S1600582 in CR3
    • S1600585 in CR4
  • 8:40am roughing pump on
  • 8:50am turbo pump on
  485   Tue Mar 13 17:20:09 2018 Gabriele Alena GeneralMeasurementsS1600609 S1600611 S1600612 S1600613

2018-03-13

  • 5:15pm in chamber
    • S1600609 in CR1
    • S1600611 in CR2
    • S1600612 in CR3
    • S1600613 in CR4
  • 5:20pm roughing pump on
  • 5:34pm turbo pump on
  484   Mon Mar 12 15:40:22 2018 GabrieleGeneralMeasurementsS1600589 S1600590

2018-03-12

  • 3:38pm in chamber
    • S1600589 in CR1
    • S1600590 in CR2
  • 3:40pm roughing pump on
  • 3:47pm turbo pump on
  483   Mon Mar 12 08:38:30 2018 GabrieleGeneralMeasurementsS1600577 S1600580 S1600582 S1600585

2018-03-12

  • 8:35am in chamber
    • S1600577 in CR1
    • S1600580 in CR2
    • S1600582 in CR3
    • S1600585 in CR4
  • 8:37am roughing pump on
  • 8:45am turbo pump on
  482   Sat Mar 10 17:35:25 2018 GabrieleGeneralMeasurementsS1600589 S1600590

2018-03-10

  • 5:34pm in chamber
    • S1600589 in CR1
    • S1600590 in CR2
  • 5:38pm roughing pump on
  • 5:48pm turbo pump on
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