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Message ID: 873     Entry time: Tue Jun 9 11:04:28 2020
Author: Gabriele 
Type: General 
Category: Measurements 
Subject: GaAs S1600805 

2020-06-09

  • 11:00 am in chamber
    • GaAs in CR1
    • S1600805 in CR2
  • 11:04 am roughing pumps on
  • 11:15 am turbo pump CR1-4 on
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