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Message ID: 852     Entry time: Thu Mar 26 13:34:20 2020
Author: Gabriele 
Type: General 
Category: Measurements 
Subject: S1600789 S1600791 

2020-03-26

  • 1:34pm in chamber
    • S1600789 in CR1
    • S1600791 in CR2
  • 1:36pm roughing pump on
  • 1:45pm turbo pump on
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