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Message ID: 850     Entry time: Tue Mar 24 14:31:31 2020
Author: Gabriele 
Type: General 
Category: Measurements 
Subject: S1600789 S1600790 S1600791  

2020-03-19

  • 2:43pm in chamber
    • S1600789 in CR1
    • S1600790 in CR2
    • S1600791 in CR3
  • 2:44pm roughing pump on
  • 2:55pm turbo pump on
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