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Message ID: 849     Entry time: Thu Mar 19 16:22:38 2020
Author: Gabriele 
Type: General 
Category: Measurements 
Subject: S1600789 

2020-03-19

  • 4:21pm in chamber
    • S1600789 in CR0
  • 4:22pm roughing pump on
  • 4:55pm turbo pump on
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