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Message ID: 603     Entry time: Thu Dec 20 16:53:15 2018
Author: Gabriele 
Type: General 
Category: Measurements 
Subject: S1812071 

2018-12-20

  • in chamber
    • S1812071 in CR0
  • 4:52pm roughing pump on
  • 5:18pm turbo pump on
ELOG V3.1.3-