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Message ID: 546     Entry time: Wed Jun 27 18:27:46 2018
Author: Alena 
Type: General 
Category: Measurements 
Subject: S1600597, S1600598, S1600599 
  • 18:27 in chamber
    • S1600597 in CR1
    • S1600598 in CR2
    • S1600599 in CR3
  • 18:28 roughing pump on
  • 18:32 turbo pump on
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