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Message ID: 530     Entry time: Mon May 14 13:42:42 2018
Author: Alena 
Type: General 
Category: Measurements 
Subject: S1800520 
  • 01:41 pm in chamber
    • S1800520 in CR0
  • 01:41 pm roughing pump on
  • 01:59 pm turbo pump on
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