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Message ID: 478     Entry time: Tue Mar 6 16:01:47 2018
Author: Gabriele 
Type: General 
Category: Measurements 
Subject: S1800516 S1800520 a-Si 2"  

2018-03-06

2 inches fused silica disks with a-Si coating

  • 4:00pm in chamber
    • S1800516 in CR1
    • S1600520 in CR2
  • 4:02pm roughing pump on
  • 4:10pm turbo pump on
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