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Message ID: 447
Entry time: Tue Dec 12 15:35:27 2017
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| Author: |
Gabriele |
| Type: |
General |
| Category: |
Measurements |
| Subject: |
University Wafers substrates (76.2mm/0.5mm) annelaed |
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2017-12-12
Four substrates from University Wafers (76.2mm / 0.5mm) in chamber
- 3:32pm in chamber (CR1 - CR4)
- 3:35pm roughing pump on
- 3:45pm turbo pump on
- Excitations:
- Quiet time before excitation: 1197168131
Excitation broadband: 1197168166
Quiet time after excitation: 1197168191
- Quiet time before excitation: 1197175421
Excitation broadband: 1197175456
Quiet time after excitation: 1197175481
- Quiet time before excitation: 1197182711
Excitation broadband: 1197182746
Quiet time after excitation: 1197182771
- Quiet time before excitation: 1197190001
Excitation broadband: 1197190036
Quiet time after excitation: 1197190061
- Quiet time before excitation: 1197197291
Excitation broadband: 1197197326
Quiet time after excitation: 1197197351
- Quiet time before excitation: 1197204581
Excitation broadband: 1197204616
Quiet time after excitation: 1197204641
- Quiet time before excitation: 1197211871
Excitation broadband: 1197211906
Quiet time after excitation: 1197211931
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