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Message ID: 379     Entry time: Wed Jul 26 09:27:40 2017
Author: Zach 
Type: Electronics 
Category: Modeling 
Subject: Sweeping the space between ESD and sample 

2017-07-26

  • I ran a sweep of the gap between the ESD and the sample, first from .5 mm to 1 mm. That sweep suggested that there is a significant jump in force across almost all of the modes at 1 mm. To confirm this I double checked the geometry and it appears that COMSOL is building everything as expected when changing the spacing parameter. Then I ran a finer sweep in .02 mm increments for the spacing between .9 and 1.1 mm. Once again it appears there is a large jump as the gap approaches 1 mm, but the behavior does not seem to be symmetric about that point, the force appears to diminish linearly as the gap increases beyond 1 mm. I will run a sweep of the ESD arm spacing along with the vertical gap to confirm that the jump occurs when the gap between the ESD and the sample is equivalent to the spacings between the ESD arms.

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