Dry fore pump of TP3 replaced by brand new Varian SH-110 at 1.1 Torr_75,208 hrs
The annuloses were closed off for 25 minutes. We are back to VACUUM NORMAL mode.
The TP3 fore line pressure dropped to 44 mTorr at 25 minutes in operation.......9.4mTorr at day 2 with full annulos load |