| Quote: |
|
Bob and Steve closed BS chamber with the help of the manual Genie lift and the pump down started. The PSL shutter was closed and manual block was placed in the beam path. High voltage power supplies were checked to be off.
Pumping speed ~ 1 Torr/min was achieved at 1/8 of a turn opened roughing valve RV1
|
We are at 370 Torr at 9 hrs of pumping. RV1 is opened to ~ 3/8 turn orifice. We are using one roughing pump RP3 and butterfly valve is in place.
How to stop: 1, close RV1 by torque wheel 2, close V3 from MEDM screen 3, turn off RP3 roughing from MEDM screen 4, disconnect metal hose to oily pump
after butterfly valve. This KF-45 O-ring seal should be kept clean 5, place/close 45 mm cover blanks at the end of the hose and and on the 5" nipple.
How to start: 1, remove blanks from hose and nipple 2, reconnect roughing pump hose to RV1 nipple 3, turn on PR3 4, open V3 5, open RV1 by wrench to ~3/8
6, fine tune RV1 opening to 1 Torr/min
ESSENTIAL: one operator has to be present when oilly roughing pump is connected to the vac. envelope |