It seemed that it comes from the servo oscillation. This does not happen when the output limitters were set to be 100-ish. But even so the gains looked quite low.

I turned on the Cheby rool-offs for all the DOFs, and this allowed me to increase the damping gain A LOT.
The gains were 2~5 but now they are now 20-25 for the face OSEMs and 150 for SD.

The attached is the example of the damping when all the damping loops are on.

I think we need to tune the servo loops carefully for all the SUSs by actually looking at the openloop transfer functions rather than a personal feeling. => To Do