I fitted the data obtained with the FSR and linewidth measurements and I've got FSR and finesse of y-arm by fitting.

The fitted data and the fitting results are attached.

Summary:

FSR = 3.9704 MHz (ave. of two FSRs, 3.9727 MHz and 3.9681 MHz)

finesse = 401 +/- 11

estimated loss = 1812 (+456 / - 431) ppm

Detail:

I found peaks from the data and fitted each peak by Lorentzian, automatically with Python (the sourse code I used is attached).

3 parameters of Lorentzian for each peak and their fitting errors are attached.

Then, using 3 peaks of carrier resonance, I calculated FSR, finesse, and loss.

The error of finesse came from that of linewidth.

When calculating the loss, I used the value of 1.384 % for transmission of ITMY. 

Note:

Since the finesse is mostly determined by the transmission of ITM, the relative error of loss estimation is larger (about 25 % ) though the relative error of finesse is about 3 %. Therefor we have to find the reason why each estimated linewidth varies that largely, and measure finesse more accurately.