I've set up a quick experiment to modulate the angle of the Hartmann sensor probe beam at 10mHz and to monitor the measured prism. The beam from the SLED is collimated by a lens and this is incident on a galvo mirror. The reflection travels around 19" and is incident on the HWS. When the galvo mirror is sent a 1.1Vpp sine wave, then beam moves around +/- 0.5" on the surface of the Hartmann sensor, giving around 50mrad per Vpp.
The galvo is currently being sent a 0.02Vpp sine wave at 10mHz.