I went inside to align the beam on WFS and noticed that oscillations in yaw are ~10 times stronger then in pitch. I've plot rms of pitch and yaw measured by LID sensors and saw that MC3 yaw rms motion is a few times larger then pitch.
What are "LID" sensors? Do you mean the OSEM shadow sensors? I'm pretty sure that's what you meant, but I'm curious what "LID" means.