For those who are interested in the actual data, I attache the actual data in zip file together with a python plot code.
The distance was set such that the 1st steering mirror (the one at the very left in the previous cartoon diagram #6445 ) in the REFL path is positioned at zero.

- - - Fitting results (chi-square fitting done by gnuplot):
All values are in unit of meter
# PRM (v) (Last tree points are excluded as the beam were clipped at the aperture of the beam scan)
w0 = 0.0015114 +/- 2.192e-05 (1.451%)
z0 = -4.46073 +/- 0.05605 (1.256%)
# PRM (h)
w0 = 0.00212796 +/- 1.287e-05 (0.6049%)
z0 = -2.53079 +/- 0.1688 (6.668%)
# ITM (v) (Last two points are excluded as the beam were clipped at the aperture of the beam scan)
w0 = 0.00190696 +/- 4.964e-05 (2.603%)
z0 = -8.09908 +/- 0.1525 (1.882%)
# ITM (h)
w0 = 0.0032539 +/- 4.602e-05 (1.414%)
z0 = -1.89484 +/- 1.524 (80.42%)
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