I set the FSS slow actuator adj to -5.6 at the lunch time. It gave a little help at that time. Now max of the MC Trans is comming back somehow. I hope the MC Trans level is as good as before, if the HEPA is slowed down.
The PSL output looks smaller than the incident. Try to FSS Slow actuator adj of -5.6 (nominal), instead of -3.5.
While I was moving a cart near by the PSL table I pushed the red emergency button that turns off the PSL laser. We had to unlock the button and then power cycle the laser driver to turn the laser back on.
I relocked MZ, FSS, PMC and I'm now waiting for the power to finish ramping up back to the previous value.