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Message ID: 11996     Entry time: Wed Feb 17 09:05:07 2016
Author: Steve 
Type: Update 
Category: VAC 
Subject: forepump replaced 

TP3 drypump replaced after 10,344 hrs at 750 mTorr foreline pressure.

The foreline pressure is 13 mTorr after 8 hrs of running, TP3: 50K rpm, 0.14 Amp with all annuloses pumped.

The annulos pressures are 0.3 - 5 mtorr

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