To check if the strange behavior of ASDC is caused by SR2/SR3 or not, I did the following measurement:

ASDC measures the power of the light reflected by ITMX. POXDC measures the power of the light reflected by ITMX and SRM successively. Then I varied the angle of ITMX in YAW direction and compared the behaviors of ASDC and POXDC.

The results are shown in Attachments 1-3.

As you can see in these figures, the strange up-and-down behavior appeared ONLY in ASDC. Therefore, the cause of this behavior exists between AS table and SRM (I had confirmed that the angle of SRM did not affect ASDC).

And this behavior is fringe-like, as can be seen in the figures (there seems to be 3 "peaks" and 2 "valleys"), so the cause could be interference between main path and not good AR reflection at a mirror after SRM before AS table (I suspect a mirror is flipped mistakenly).